Analysis of High-Speed Signal Behavior in a Miniaturized Interconnect(Special Issue on Advanced Sub-0.1μm CMOS Devices)
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概要
- 論文の詳細を見る
Precise interconnect analysis is strongly required for giga-scale integration the operation frequency of which is excess 10GHz. In this study, detailed and accurate analyses of a coaxial interconnect and an actual rectangular interconnect have been performed by the direct evaluation of Maxwell's equations and the finite element method, respectively. It has been revealed that there are two propagation modes for LSI interconnects: skin depth limited propagation mode and interconnect induced slow wave mode. In a miniaturized interconnect, the propagation mode is the interconnect induced slow wave mode; therefore, we cannot obtain the light-speed propagation due to such an interconnect-induced effect. In order to overcome this speed limitation or to improve signal integrity, it is essential to introduce a short interconnect for a miniaturized structure, and a much larger interconnect than the skin depth. We propose a gas-isolated interconnect as a candidate for an ultimately low-k structure in order to increase the signal-propagation speed. By the introduction of such structures, the performance of miniaturized devices in the deep submicron region will be effectively enhanced.
- 社団法人電子情報通信学会の論文
- 2002-05-01
著者
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Kotani K
Department Of Electronic Engineering Graduate School Of Engineering Tohoku University
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Kotani Koji
Graduate School Of Engineering Tohoku University
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Kotani Koji
Faculty of Environment and Information Sciences, Yokohama National University
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OHMI Tadahiro
New Industry Creation Hatchery Center, Tohoku University
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Kotani Koji
Laboratory For Electronic Intelligent Systems Research Institute Of Electrical Communication Tohoku
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MORIMOTO Akihiro
Faculty of Science and Engineering, Ritsumeikan University
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SUGAWA Sigetoshi
Tohoku University
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Kotani K
Tohoku Univ. Sendai‐shi Jpn
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Morimoto A
Kanazawa Univ. Kanazawa Jpn
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TAKAHASHI Kazushi
Faculty of Electronic Engineering, Tohoku University
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SUGAWA Shigetoshi
Faculty of Electronic Engineering, Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center Future Information Industry Creation Center Tohoku University
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Morimoto Akihiro
Faculty Of Electronic Engineering Tohoku University
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Takahashi Kazushi
Faculty Of Electronic Engineering Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center (niche) Tohoku University
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