Impurity Measurement in Specialty Gases Using an Atmospheric Pressure Ionizaiton Mass Spectrometer with a Two-Compartment Ion Source
スポンサーリンク
概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-04-01
著者
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OHMI Tadahiro
New Industry Creation Hatchery Center, Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center Future Information Industry Creation Center Tohoku University
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Ohki A
Osaka Sanso Kogyo Ltd.
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KITANO Masafumi
New Industry Creation Hatchery Center, University of Tohoku
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SHIRAI Yasuyuki
New Industry Creation Hatchery Center, University of Tohoku
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OHKI Atsushi
Osaka Sanso Kogyo Ltd.
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BABASAKI Shinichi
Nihon Pall Ltd.
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Kitano M
Shimane Univ. Matsue Jpn
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Shirai Yasuyuki
New Industry Creation Hatchery Center Tohoku University
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Shirai Yasuyuki
New Industry Creation Hatchery Center (niche) Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center (niche) Tohoku University
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