Source/Drain Dopant Deactivation and Junction Degradation by Energetic Ions in Plasma Processes
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概要
- 論文の詳細を見る
- 2001-09-25
著者
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Ohmi Tadahiro
New Industry Creation Hatchery Center Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center Future Information Industry Creation Center Tohoku University
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Tamai Yukio
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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Tamai Yukio
Department Of Electronic Engineering Graduate School Of Engineering Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center (niche) Tohoku University
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