A New Two-Step Round Oxidation STI Technology for Highly Reliable Flash Memory
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概要
- 論文の詳細を見る
- 2001-09-25
著者
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OHMI Tadahiro
New Industry Creation Hatchery Center, Tohoku University
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UEDA Naoki
Process Development Laboratory, Sharp Corporation
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YAMAUCHI Yoshimitsu
Process Development Laboratory, Sharp Corporation
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Ohmi Tadahiro
New Industry Creation Hatchery Center Future Information Industry Creation Center Tohoku University
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Ueda Naoki
Process Development Laboratory Sharp Corporation
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Yamauchi Yoshimitsu
Process Development Laboratory Sharp Corporation
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Ohmi Tadahiro
New Industry Creation Hatchery Center (niche) Tohoku University
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