A Low-Dielectric-Constant Sr_2(Ta_<1-x>, Nb_x)_2O_7 Thin Film Controlling the Crystal Orientation on an IrO_2 Substrate for One-Transistor-Type Ferroelectric Memory Device
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-04-30
著者
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TERAMOTO Akinobu
New Industry Creation Hatchery Center, Tohoku University
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SUGAWA Shigetoshi
Graduate School of Engineering, Tohoku University
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OHMI Tadahiro
New Industry Creation Hatchery Center, Tohoku University
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HIRAYAMA Masaki
New Industry Creation Hatchery Center, Tohoku University
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Goto Tetsuya
New Industry Creation Hatchery Center Tohoku University
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FUNAIWA Kiyoshi
New Industry Creation Hatchery Center, Tohoku University
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TAKAHASHI Ichirou
New Industry Creation Hatchery Center, Tohoku University
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SAKURAI Hiroyuki
New Industry Creation Hatchery Center, Tohoku University
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YAMADA Atsuhiko
Graduate School of Engineering, Tohoku University
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