Ultra-Thin Silicon Oxynitride Film Grown at Low-Temperature by Microwave-Excited High-Density Kr/O_2/N_2 Plasma

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概要

• 論文の詳細を見る
• 2000-08-28

著者

• OHMI Tadahiro

  New Industry Creation Hatchery Center, Tohoku University

• AHARONI Herzl

  Department of Electronic Engineering, Faculty of Engineering, Tohoku University

• Saito Yuji

  Department Of Electronic Engineering Graduate School Of Engineering Tohoku University

• SUGAWA Shigetoshi

  Department of Electronic Engineering, Graduate School of Engineering, Tohoku University

• OHTSUBO Kazuo

  Department of Electronic Engineering, Graduate school of Engineering, Tohoku University

• SEKINE Katsuyuki

  Department of Electronic Engineering, Graduate school of Engineering, Tohoku University

• HIRAMAYA Masaki

  Department of Electronic Engineering, Graduate School of Engineering, Tohoku University

• Saito Y

  Department Of Electrical And Electronic Engineering Faculty Of Engineering Mie University

• HIGUCHI Masaaki

  TOSHIBA CORPORATION

• SUGAWA Sigetoshi

  Tohoku University

• HIRAYAMA Masaki

  New Industry Creation Hatchery Center, Tohoku University

• Sugawa Shigetoshi

  Graduate School Of Engineering Tohoku University

• Sugawa Shigetoshi

  Department Of Electronic Engineering Tohoku University

• Hirayama Masaki

  Toshiba Corporation

• Ohmi Tadahiro

  New Industry Creation Hatchery Center Future Information Industry Creation Center Tohoku University

• Aharoni Herzl

  New Industry Creation Hatchery Center Tohoku University

• Ohtsubo Kazuo

  Department Of Electronic Engineering Graduate School Of Engineering Tohoku University

• Saito Yuji

  Department Of Anesthesiology Gunma Prefectural Cardiovascular Center

• Sekine K

  Japan Aviation Electronics Ind. Ltd. Tokyo Jpn

• Sekine Katsuyuki

  Department Of Electronic Engineering Faculty Of Engineering Tohoku University

• Ohmi Tadahiro

  New Industry Creation Hatchery Center (niche) Tohoku University

• Aharoni Herzl

  Department of Electrical and Computer Engineering, Ben Gurion University of the Negev, Beer-Sheva 84105, Israel

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