MFIS-structure Memory Device with High Quality Ferroelectric Sr_2(Ta_<1-x>Nb_x)_2O_7 Formed by Physical Vapor Deposition and Oxygen Radical Treatment by Radical Oxygen Assisted Layer by Layer(ROALL) deposition

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概要

• 論文の詳細を見る
• 2004-09-15

著者

• TERAMOTO Akinobu

  New Industry Creation Hatchery Center, Tohoku University

• OHMI Tadahiro

  New Industry Creation Hatchery Center, Tohoku University

• SUGAWA Shigetoshi

  New Industry Creation Hatchery Center, Tohoku University

• HIGUCHI Masaaki

  TOSHIBA CORPORATION

• SUGAWA Sigetoshi

  Tohoku University

• HIRAYAMA Masaki

  New Industry Creation Hatchery Center, Tohoku University

• Goto Tetsuya

  New Industry Creation Hatchery Center Tohoku University

• ISOGAI Tatsunori

  Graduate School of Engineering, Tohoku University

• Teramoto Akinobu

  New Industry Creation Hatchery Center Tohoku University

• Sugawa Shigetoshi

  Graduate School Of Engineering Tohoku University

• Hirayama Masaki

  Toshiba Corporation

• Hirayama Masaki

  New Industry Creation Hatchery Center Tohoku University

• Ohmi Tadahiro

  New Industry Creation Hatchery Center Future Information Industry Creation Center Tohoku University

• FUNAIWA Kiyoshi

  New Industry Creation Hatchery Center, Tohoku University

• Funaiwa Kiyoshi

  New Industry Creation Hatchery Center Tohoku University

• TAKAHASHI Ichirou

  New Industry Creation Hatchery Center, Tohoku University

• SAKURAI Hiroyuki

  New Industry Creation Hatchery Center, Tohoku University

• ISOGAI Tatsunori

  New Industry Creation Hatchery Center, Tohoku University

• TSUNODA Tomoya

  New Industry Creation Hatchery Center, Tohoku University

• Sakurai Hiroyuki

  New Industry Creation Hatchery Center Tohoku University

• Takahashi Ichirou

  Graduate School Of Engineering Tohoku University

• Shimada Hiroyuki

  New Industry Creation Hatchery Center Tohoku University

• Teramoto Akinobu

  New Industry Creation Hatchery Center Tohoku Univ.

• Tsunoda Tomoya

  New Industry Creation Hatchery Center Tohoku University

• Isogai Tatsunori

  Graduate School Of Engineering Tohoku University

• Ohmi Tadahiro

  New Industry Creation Hatchery Center (niche) Tohoku University

• Teramoto Akinobu

  New Industry Creation Hatchery Center (NICHe), Tohoku University, Sendai 980-8579, Japan

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