Gas Flow Characteristics in a Plasma Process Chamber and Proposal of New Pulse-Controlled Gas Injection Method Using Interference Matrix Operation for Rapid Stabilization of Gas Pressure
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Goto Tetsuya
New Industry Creation Hatchery Center Tohoku University
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Shirai Yasuyuki
New Industry Creation Hatchery Center (niche) Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center (niche) Tohoku University
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Morishita Sadaharu
Technology Collaboration Center, Research and Development HQ, OMRON Corporation, Kyoto 619-0283, Japan
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