Morishita Sadaharu | Technology Collaboration Center, Research and Development HQ, OMRON Corporation, Kyoto 619-0283, Japan

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概要

• 同名の論文著者
• Technology Collaboration Center, Research and Development HQ, OMRON Corporation, Kyoto 619-0283, Japanの論文著者

関連著者

• Goto Tetsuya

  New Industry Creation Hatchery Center Tohoku University

• Shirai Yasuyuki

  New Industry Creation Hatchery Center (niche) Tohoku University

• Ohmi Tadahiro

  New Industry Creation Hatchery Center (niche) Tohoku University

• Morishita Sadaharu

  Technology Collaboration Center, Research and Development HQ, OMRON Corporation, Kyoto 619-0283, Japan

著作論文

• Gas Flow Characteristics in a Plasma Process Chamber and Proposal of New Pulse-Controlled Gas Injection Method Using Interference Matrix Operation for Rapid Stabilization of Gas Pressure

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