Perfectly Etching Uniformity Control of Various Doped Oxide Films Using an Anhydrous HF Gas

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概要

• 論文の詳細を見る
• 2000-08-28

著者

• Ohmi Tadahiro

  New Industry Creation Hatchery Center Future Information Industry Creation Center Tohoku University

• Shirai Yasuyuki

  New Industry Creation Hatchery Center (niche) Tohoku University

• ARAKAWA Hiroshi

  New Industry Creation Hatchery Center (NICHe), Tohoku University

• Ohmi Tadahiro

  New Industry Creation Hatchery Center (niche) Tohoku University

• Arakawa Hiroshi

  New Industry Creation Hatchery Center (niche) Tohoku University

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