Perfectly Etching Uniformity Control of Various Doped Oxide Films Using an Anhydrous HF Gas
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概要
- 論文の詳細を見る
- 2000-08-28
著者
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Ohmi Tadahiro
New Industry Creation Hatchery Center Future Information Industry Creation Center Tohoku University
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Shirai Yasuyuki
New Industry Creation Hatchery Center (niche) Tohoku University
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ARAKAWA Hiroshi
New Industry Creation Hatchery Center (NICHe), Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center (niche) Tohoku University
-
Arakawa Hiroshi
New Industry Creation Hatchery Center (niche) Tohoku University
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