Self-Aligned Aluminum-Gate MOSFET's Having Ultra-Shallow Junctions Formed by 450℃ Furnace Annealing (Special Issue on Sub-Half Micron Si Device and Process Technologies)

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概要

• 論文の詳細を見る

• Self-aligned aluminum-gate MOSFET's have been successfully fabricated by employing ultraclean ion implantation technology. The use of ultra high vacuum ion implanter and the suppression of high-energy ion-beam-induced metal sputter contamination have enabled us to form ultra-shallow low-leakage pn junctions by furnace annealing at a temperature as low as 450℃. The fabricated aluminum-gate MOSFET's have exhibited good electrical characteristics, thus demonstrating a large potential for application to realizing ultra-high-speed integrated circuits.

• 社団法人電子情報通信学会の論文
• 1993-04-25

著者

• Kotani K

  Department Of Electronic Engineering Graduate School Of Engineering Tohoku University

• Kotani Koji

  Graduate School Of Engineering Tohoku University

• Kotani Koji

  Faculty of Environment and Information Sciences, Yokohama National University

• Shibata Tadashi

  Department Of Information And Communication Engineering The University Of Tokyo

• Shibata T

  Univ. Tokyo Tokyo Jpn

• Shibata T

  Department Of Information And Communication Engineering The University Of Tokyo

• Kotani Koji

  Laboratory For Electronic Intelligent Systems Research Institute Of Electrical Communication Tohoku

• OHMI Tadahiro

  Faculty of Engineering, Tohoku University

• Kotani K

  Tohoku Univ. Sendai‐shi Jpn

• Shibata Tadashi

  Faculty of Engineering, Tohoku University

• Ohmi Tadahiro

  Faculty Of Engineering Tohoku University

• Shibata T

  Ntt Photonics Laboratories Ntt Corporation:(present Address)ntt Science And Core Technology Group Nt

• Shimonishi Satoshi

  Faculty of Engineering, Tohoku University

• Migita Tomohiro

  Faculty of Engineering, Tohoku University

• Komori Hideki

  Faculty of Engineering, Tohoku University

• Komori Hideki

  Faculty Of Engineering Tohoku University

• Migita Tomohiro

  Faculty Of Engineering Tohoku University

• Shimonishi Satoshi

  Faculty Of Engineering Tohoku University

• Shibata Tadashi

  Faculty Of Engineering Science Osaka University

• Ohmi Tadahiro

  Faculty Of Engineering Tohoku Univ.

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