Neutralization of Static Electricity by Soft X-Ray and Vacuum Ultraviolet (UV)-Ray Irradiation (Special Issue on Scientific ULSI Manufacturing Technology)
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概要
- 論文の詳細を見る
A new anti-static technology to neutralize static electricity by high energy photon irradiation has been developed. Ions and electrons required for neutralization are generated by ionization of gas molecules in the vicinity of a charged substance. Gas molecules absorbs photons to become ionized. The wavelength chosen for the irradiation depends on the neutralization atmosphere. Soft X-rays with wavelength over about 1 Å are effective in air or O_2 gas at pressure higher than several hundreds Torr. Vacuum UV-rays with wavelength below about 1350 Å is effective in N_2 gas, Ar gas, or reduced pressure ambients. These methods feature excellent neutralization capability. Electrostatic potential can be reduced to 0 V in a very short time without encountering the problems of which conventional corona discharge ionizers.
- 社団法人電子情報通信学会の論文
- 1996-03-25
著者
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Ohmi T
Tohoku Univ. Sendai Jpn
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INABA Hitoshi
Takasago Thermal Engineering Co., Ltd.
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OHMI Tadahiro
Faculty of Engineering, Tohoku University
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YOSHIDA Takanori
Takasago Thermal Engineering Co., Ltd.
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OKADA Takao
Takasago Thermal Engineering Co., Ltd.
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Ohmi Tadahiro
Faculty Of Engineering Tohoku University
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Inaba Hitoshi
Takasago Thermal Engineering Co. Ltd.
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Yoshida Takanori
Takasago Thermal Engineering Co. Ltd.
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Okada Takao
Takasago Thermal Engineering Co. Ltd.
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Ohmi Tadahiro
Faculty Of Engineering Tohoku Univ.
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