OHMI Tadahiro | Faculty of Engineering, Tohoku University
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概要
関連著者
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OHMI Tadahiro
Faculty of Engineering, Tohoku University
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Ohmi Tadahiro
Faculty Of Engineering Tohoku University
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Ohmi Tadahiro
Faculty Of Engineering Tohoku Univ.
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Shibata Tadashi
Department Of Information And Communication Engineering The University Of Tokyo
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Shibata T
Univ. Tokyo Tokyo Jpn
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Shibata T
Department Of Information And Communication Engineering The University Of Tokyo
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Shibata Tadashi
Faculty of Engineering, Tohoku University
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Shibata T
Ntt Photonics Laboratories Ntt Corporation:(present Address)ntt Science And Core Technology Group Nt
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Shibata Tadashi
Faculty Of Engineering Science Osaka University
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Kotani K
Department Of Electronic Engineering Graduate School Of Engineering Tohoku University
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Kotani Koji
Graduate School Of Engineering Tohoku University
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Kotani Koji
Faculty of Environment and Information Sciences, Yokohama National University
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Kotani Koji
Laboratory For Electronic Intelligent Systems Research Institute Of Electrical Communication Tohoku
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Kotani K
Tohoku Univ. Sendai‐shi Jpn
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NITTA Takahisa
Device Development Center, Hitachi, Ltd.
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Morita Mizuho
Faculty Of Engineering Tohoku University
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Ohmi T
Tohoku Univ. Sendai Jpn
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INABA Hitoshi
Takasago Thermal Engineering Co., Ltd.
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YOSHIDA Takanori
Takasago Thermal Engineering Co., Ltd.
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OKADA Takao
Takasago Thermal Engineering Co., Ltd.
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MITSUI Yasuhiro
Semiconductor & Integrated Circuits Division, Hitachi Ltd.
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Hoshi Tsukasa
Faculty of Engineering, Tohoku University
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Takewaki Toshiyuki
Faculty of Engineering, Tohoku University
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Hoshi Tsukasa
Faculty Of Engineering Tohoku University
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Takewaki Toshiyuki
Nec Electronics Corporation
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Takewaki Toshiyuki
Faculty Of Engineering Tohoku University
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Saito Kazuyuki
Ntt Lsi Laboratories
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Yabumoto Norikuni
Ntt Lsi Laboratories
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Nitta Takahisa
Device Development Center Hitachi Ltd.
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Ohki Atsushi
Technical Headquarters Osaka Sanso Kogyo Ltd.
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HAYASHI Shigeki
Technical Headquarters, Osaka Sanso Kogyo Ltd.
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Shimonishi Satoshi
Faculty of Engineering, Tohoku University
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Migita Tomohiro
Faculty of Engineering, Tohoku University
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Komori Hideki
Faculty of Engineering, Tohoku University
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Komori Hideki
Faculty Of Engineering Tohoku University
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Migita Tomohiro
Faculty Of Engineering Tohoku University
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Shimonishi Satoshi
Faculty Of Engineering Tohoku University
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Inaba Hitoshi
Takasago Thermal Engineering Co. Ltd.
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Mitsui Yasuhiro
Semiconductor & Integrated Circuits Div. Hitachi Ltd.
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Yoshida Takanori
Takasago Thermal Engineering Co. Ltd.
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Okada Takao
Takasago Thermal Engineering Co. Ltd.
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Hayashi Shigeki
Technical Headquarters Osaka Sanso Kogyo Ltd.
著作論文
- Neutralization of Static Electricity by Soft X-Ray and Vacuum Ultraviolet (UV)-Ray Irradiation (Special Issue on Scientific ULSI Manufacturing Technology)
- Characterizing Film Quality and Electromigration Resistance of Giant-Grain Copper Interconnects (Special Issue on Sub-Half Micron Si Device and Process Technologies)
- Oxidation Process of Hydrogen Terminated Silicon Surface Studied by Thermal Desorption Spectroscopy
- Quick External Leakage Inspection Method for Gas Supplying System in Semiconductor Facility Using Atmospheric Pressure Ionization Mass Spectrometer
- Impact of High-Precision Processing on the Functional Enhancement of Neuron-MOS Integrated Circuits (Special Issue on Scientific ULSI Manufacturing Technology)
- Self-Aligned Aluminum-Gate MOSFET's Having Ultra-Shallow Junctions Formed by 450℃ Furnace Annealing (Special Issue on Sub-Half Micron Si Device and Process Technologies)