Cr_2O_3 Passivated Gas Tubing System for Specialty Gases (Special Issue on Scientific ULSI Manufacturing Technology)
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概要
- 論文の詳細を見る
We have developed a complete chromium oxide (Cr_2O_3) passivated gas tubing system by introducing ferritic stainless steel instead of conventional austenitic stainless steel (SUS316L). 100% Cr_2O_3 passivation film can be formed on electropolished ferritic stainless steel surface because the diffusion coefficient of Cr in ferritic stainless steel is 1O^4 times larger than in austenitic stainless steel. In ferritic stainless steel, moreover, welded bead surface is covered by 100% Cr_2O_3 passivated film by an introduction of advanced welding technology.
- 社団法人電子情報通信学会の論文
- 1996-03-25
著者
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Ohmi Tadahiro
Faculty Of Engineering Tohoku University
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Shirai Yasuyuki
Faculty Of Engineering Tohoku University
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NARAZAKI Masaki
Faculty of Engineering, Tohoku University
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Ohmi Tadahiro
Faculty Of Engineering Tohoku Univ.
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Narazaki Masaki
Faculty Of Engineering Tohoku University
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