Enlargement of Crystal-Grains in Thin Silicon Films Using Continuous-Wave Laser Irradiation

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概要

• 論文の詳細を見る
• 2006-09-13

著者

• Kotani K

  Department Of Electronic Engineering Graduate School Of Engineering Tohoku University

• Kotani Koji

  Graduate School Of Engineering Tohoku University

• Kotani K

  Tohoku Univ. Sendai‐shi Jpn

• ITO Takashi

  Graduate School of Engineering, Tohoku University

• KUROKI Shin-Ichiro

  Graduate School of Engineering, Tohoku University

• FUJII Shuntaro

  Graduate School of Engineering, Tohoku University

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• Enlargement of Crystal Grains in Thin Silicon Films by Continuous-Wave Laser Irradiation

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