Low-Temperature Recrystallization of Ferroelectric Lead Zirconate Titanate Thin Films on Glass Substrate Using Continuous-Wave Green Laser
スポンサーリンク
概要
- 論文の詳細を見る
A continuous-wave (CW) green laser with the wavelength of 532 nm was employed to crystallize lead zirconate titanate (PZT) films on glass substrates. The firing was local and instantaneous, and annealing time ($10^{-5}$–$10^{-1}$ s) was controlled by adjusting the laser scanning speed. After CW green laser annealing, three typical crystallization modes of the PZT thin films were observed, that is, microcrystallization, island crystallization, and lateral crystallization. In the island crystal region, the PZT film was crystallized uniformly and sufficiently over the thin films, and the ferroelectric perovskite $c$-axis (001) was dominant. In this region the remanent polarization of 13 μC/cm2 was achieved.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-04-25
著者
-
Kotani Koji
Graduate School Of Engineering Tohoku University
-
ITO Takashi
Graduate School of Engineering, Tohoku University
-
KUROKI Shin-Ichiro
Graduate School of Engineering, Tohoku University
-
Kotani Koji
Graduate School of Engineering, Tohoku University, 6-6-05 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
-
Kuroki Shin-Ichiro
Graduate School of Engineering, Tohoku University, 6-6-05 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
-
Tago Kiichiro
Graduate School of Engineering, Tohoku University, 6-6-05 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
-
Ito Takashi
Graduate School of Engineering, Tohoku University, 6-6-05 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
関連論文
- Optimal Escapement Levels on Renewable Resource Management under Process Uncertainty : Some Implications of Convex Unit Harvest Cost
- Subvector-Based Fast Encoding Method for Vector Quantization Without Using Two Partial Variances
- Performance Comparison between Equal-Average Equal-Variance Equal-Norm Nearest Neighbor Search (EEENNS) Method and Improved Equal-Average Equal-Variance Nearest Neighbor Search (IEENNS) Method for Fast Encoding of Vector Quantization(Image Processing and
- Fast Encoding Method for Image Vector Quantization Based on Multiple Appropriate Features to Estimate Euclidean Distance
- A Fast Encoding Method for Vector Quantization Using Modified Memory-Efficient Sum Pyramid
- A Fast Search Method for Vector Quantization Using Enhanced Sum Pyramid Data Structure(Image)
- An Improved Fast Encoding Algorithm for Vector Quantization Using 2-Pixel-Merging Sum Pyramid and Manhattan-Distance-First Check(Image Processing, Image Pattern Recognition)
- A Fast Encoding Method for Vector Quantization Using L_1 and L_2 Norms to Narrow Necessary Search Scope(Image Processing, Image Pattern Recognition)
- A Fast Encoding Method for Vector Quantization Based on 2-Pixel-Merging Sum Pyramid Data Structure(Image)
- A nonlinear cepstral compensation method for noisy speech processing (音声言語情報処理 研究報告 第1回音声言語シンポジウム(SPLC))
- Extracting person's speech individually from original records of meeting by speaker identification technique
- Bioeconomic assessment of size separators in Pacific saury fishery
- Theoretical Analysis of Surface Acoustic Wave Propagation Characteristics under Strained Media and Applications for High Temperature Stable High Coupling Surface Acoustic Wave Substrates
- The Evaluation of New Amorphous Hydrocarbon Film aCHx, for Copper Barrier Dielectric Film in Low-k Copper Metallization
- A High S/N Ratio Object Extraction CMOS Image Sensor with Column Parallel Signal Processing
- A Large-Signal MOSFET Model Based on Transient Carrier Response for RF Circuits
- A High S/N Ratio Object Extraction CMOS Image Sensor with Column Parallel Signal Processing
- Analysis of High-Speed Signal Behavior in a Miniaturized Interconnect(Special Issue on Advanced Sub-0.1μm CMOS Devices)
- Interconnect and Substrate Structure for Gigascale Integration
- Interconnect and Substrate Structure for High Speed Giga-Scale Integration
- A nonlinear cepstral compensation method for noisy speech processing (第1回音声言語シンポジウム(SPLC))
- A nonlinear cepstral compensation method for noisy speech processing (第1回音声言語シンポジウム(SPLC))
- Observation of Ferroelectric Polarization in KNbO_3 Thin Films and Surface Acoustic Wave Properties
- Low Power Neuron-MOS Technology for High-Functionality Logic Gate Synthesis (Special Issue on New Concept Device and Novel Architecture LSIs)
- High-throughput Fluorescence Labelling of Full-length cDNA Products Based on a Reconstituted Translation System
- Electrical characteristics of novel non-porous low-k dielectric fluorocarbon on Cu interconnects for 22nm generation and beyond (Special issue: Advanced metallization for ULSI applications)
- Impact of High-Precision Processing on the Functional Enhancement of Neuron-MOS Integrated Circuits (Special Issue on Scientific ULSI Manufacturing Technology)
- Self-Aligned Aluminum-Gate MOSFET's Having Ultra-Shallow Junctions Formed by 450℃ Furnace Annealing (Special Issue on Sub-Half Micron Si Device and Process Technologies)
- Hot-Carrier-Immunity Degradation in Metal Oxide Semiconductor Field Effect Transistors Caused by Ion-Bombardment Processes
- ACT Domain Repeat Protein 7, ACR7, Interacts with a Chaperone HSP18.0-CII in Rice Nuclei
- Interaction of N-Acetylglutamate Kinase with a PII-Like Protein in Rice
- A 100 MHz 7.84 mm^2 31.7 msec 439 mW 512-Point 2-Dimensional FFT Single-Chip Processor(Low-Power System LSI, IP and Related Technologies)
- Strain-Induced Back Channel Electron Mobility Enhancement in Polycrystalline Silicon Thin-Film Transistors Fabricated by Continuous-Wave Laser Lateral Crystallization
- Modified Membrane Approximation on a Thin Liquid Sheet : Classical Phenomenology and Applications
- Enhancement of Current Drivability of Nanograting Polycrystalline Silicon Thin-Film Transistors
- Unsupervised Speaker Adaptation Using Speaker-Class Models for Lecture Speech Recognition
- Ferroelectric Properties of Lead Zirconate Titanate Thin Film on Glass Substrate Crystallized by Continuous-Wave Green Laser Annealing
- FE-based Analysis for the Microstructure Evolution in Hot Bar Rolling
- Characteristics of Nano-Grating N-Channel MOSFETs for Improved Current Drivability(Semiconductor Materials and Devices)
- Lateral Recrystallized Si Thin Films with Large Tensile Strain for High Performance Thin Film Transistors
- Enlargement of Crystal-Grains in Thin Silicon Films Using Continuous-Wave Laser Irradiation
- Tri-Gate Polycrystalline Silicon Thin-Film Transistors Fabricated by Continuous-Wave Laser Lateral Crystallization with Improved Electron Transport Properties (Special Issue : Solid State Devices and Materials (1))
- Integration Process Development for Improved Compatibility with Organic Non-Porous Ultralow-k Dielectric Fluorocarbon on Advanced Cu Interconnects
- Evaluation of New Amorphous Hydrocarbon Film for Copper Barrier Dielectric Film in Low-$k$ Copper Metallization
- In-Plane Grain Orientation Alignment of Polycrystalline Silicon Films by Normal and Oblique-Angle Ion Implantations
- Low-Temperature Recrystallization of Ferroelectric Lead Zirconate Titanate Thin Films on Glass Substrate Using Continuous-Wave Green Laser
- Analysis of Continuous-Wave Laser Lateral Crystallized Polycrystalline Silicon Thin Films with Large Tensile Strain
- Roughness Reduction in Polycrystalline Silicon Thin Films Formed by Continuous-Wave Laser Lateral Crystallization with Cap SiO2 Thin Films
- Enlargement of Crystal Grains in Thin Silicon Films by Continuous-Wave Laser Irradiation