P-12 Effect of Dissolved Gases on Ultrasonic Cavitation in Liquid(Poster Presentations)
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概要
- 論文の詳細を見る
- 日本ソノケミストリー学会の論文
- 2007-11-15
著者
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OHMI Tadahiro
Tohoku University
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Soejima Jun-ichiro
Kaijo Co. Ltd.
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Ohmi Tadahiro
Tohoku Univ.
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Morinaga Hitoshi
Fujimi Inc., Kakamigahara, Gifu 509-0109, Japan
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Hirayama Seigo
Kaijo Corporation
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Morinaga Hitoshi
Fujimi Incorporated
関連論文
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- Accurate Friction Compensation for a High Precision Stage using a Synchronous Piezoelectric Device Driver
- Slip-Free Driving Method for Nonresonant Piezoelectric Actuator
- Highly Reliable Piezoelectric Actuator for Precision Stage System
- P-PW-05 Development of the non-resonance type ultra-sonic motor and its application for XY-stage
- Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage
- Evaluation of SOI Wafer Quality and Technological Issues to be Solved
- Reliability of parameters of associated base straight line in step height samples : Uncertainty evaluation in step height measurements using nanometrological AFM
- FOREWORD (Special Issue on Scientific ULSI Manufacturing Technology)
- Development of High-Temperature Ultrasonic Flowmeter for Measuring Flowrate of Automotive Exhaust Gas
- PREFACE
- Slip-Free Driving Method for Nonresonant Piezoelectric Actuator
- Disappearance of Barrier Metal during Cu Chemical Mechanical Planarization Processing and Its Mechanism
- P-12 Effect of Dissolved Gases on Ultrasonic Cavitation in Liquid(Poster Presentations)