Ohmi Tadahiro | Tohoku Univ.
スポンサーリンク
概要
関連著者
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Ohmi Tadahiro
Tohoku Univ.
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OHMI Tadahiro
Tohoku University
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Ohmi Tadahiro
Tohoku Univ. Sendai Jpn
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KOSAKA Kouji
Tech-concierge Kumamoto Inc.
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EGASHIRA Yoshiya
Kumamoto Technology and Industry Foundation
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Nakada Akira
Graduate School Of Science And Technology Kumamoto University
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Endo Taishi
Graduate School Of Science And Technology Kumamoto University
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Kubota Hiroshi
Graduate School Of Science And Technology Kumamoto University
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久保田 均
産総研
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Nakada Akira
Kumamoto Univ. Kumamoto Jpn
著作論文
- Adaptive friction compensation for a high precision stage using synchronous piezoelectric device driver (産業計測制御研究会 計測・センサ応用,モーションコントロール全般)
- Accurate Friction Compensation for a High Precision Stage using a Synchronous Piezoelectric Device Driver
- Highly Reliable Piezoelectric Actuator for Precision Stage System
- P-PW-05 Development of the non-resonance type ultra-sonic motor and its application for XY-stage
- Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage
- Evaluation of SOI Wafer Quality and Technological Issues to be Solved
- Reliability of parameters of associated base straight line in step height samples : Uncertainty evaluation in step height measurements using nanometrological AFM
- FOREWORD (Special Issue on Scientific ULSI Manufacturing Technology)
- PREFACE
- Slip-Free Driving Method for Nonresonant Piezoelectric Actuator