Ohmi Tadahiro | Tohoku Univ. Sendai Jpn
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概要
関連著者
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Ohmi Tadahiro
Tohoku Univ. Sendai Jpn
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Ohmi Tadahiro
Tohoku Univ.
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OHMI Tadahiro
Tohoku University
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KOSAKA Kouji
Tech-concierge Kumamoto Inc.
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久保田 均
産総研
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Nakada Akira
Kumamoto Univ. Kumamoto Jpn
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ENDO Taishi
Graduate School of Science and Technology, Kumamoto University
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EGASHIRA Yoshiya
Kumamoto Technology and Industry Foundation
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NAKADA Akira
Graduate School of Science and Technology, Kumamoto University
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KUBOTA Hiroshi
Graduate School of Science and Technology, Kumamoto University
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HASHIGUTI Hiroyuki
Graduate School of Science and Technology Kumamoto University
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久保田 均
産業技術総合研
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Endo Taishi
Kumamoto Univ. Kumamoto Jpn
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Nakada Akira
Graduate School Of Science And Technology Kumamoto University
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Endo Taishi
Graduate School Of Science And Technology Kumamoto University
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Egashira Yoshiya
Kumamoto Technology Inc.:tokyo Technology Inc.:graduate School Of Science And Technology Kumamoto Un
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Kubota Hiroshi
Graduate School Of Science And Technology Kumamoto University
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OHISHI Kiyoshi
Nagaoka University of Technology
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Minh Truong
Nagaoka University Of Technology
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Ohishi Kiyoshi
Nagaoka Univ. Technol.
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TAKATA Masasuke
Nagaoka University of Technology
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HASHIMOTO Seiji
Gunma University
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KUBOTA Hiroshi
Kumamoto University
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Watanabe Masaya
Department Of Electrical And Electronic Engineering Faculty Of Engineering And Resource Science Akit
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HASHIGUCHI Hiroyuki
Graduate School of Science and Technology, Kumamoto University
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WATANABE Masayuki
Taiheiyo Cement Corporation
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MIYATA Noboru
Taiheiyo Cement Corporation
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KOSAKA Tetsuya
Kumamoto Technology Incorporated
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YAMAKAWA Takahiro
Taiheiyo Cement Corporation
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IWABUCHI Tetsuya
Kumamoto Technology Inc.
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NAGAMOTO Keiichi
Graduate School of Science and Technology Kumamoto University
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Takashi Harada
Graduate School of Science and Technology Kumamoto University
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MORIZONO Yasuhiro
Graduate School of Science and Technology Kumamoto University
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IWABUCHI Tetsuya
UCAR
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Iwabuchi T
Ucar
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TERAMOTO Akinobu
New Industry Creation Hatchery Center, Tohoku University
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OHMI Tadahiro
New Industry Creation Hatchery Center, Tohoku University
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Morita Mizuho
Osaka Univ.
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KAWASE Kazumasa
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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UMEDA Hiroshi
Process Development Dept., Wafer Process Engineering Development Div., LSI Manufacturing Unit, Renes
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INOUE Masao
Process Development Dept., Wafer Process Engineering Development Div., LSI Manufacturing Unit, Renes
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TSUJIKAWA Shimpei
Process Development Dept., Wafer Process Engineering Development Div., LSI Manufacturing Unit, Renes
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AKAMATSU Yasuhiko
Process Development Dept., Wafer Process Engineering Development Div., LSI Manufacturing Unit, Renes
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FUJIMOTO Toshiyuki
National Institute of Advanced Industrial Science and Technology (AIST)
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TSUCHIYA Toshiaki
Shimane University
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KUROSAWA Tomizo
National Research Laboratory of Metrology
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KOJIMA Isao
National Institute of Materials and Chemical Research
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Maegawa Shigeto
Mitsubishi Electric
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FURUKAWA Hiroyuki
Graduate School of Science and Technology, Kumamoto University
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KOSAKA Kouji
Graduate School of Science and Technology, Kumamoto University
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KOSAKA Koji
Graduate School of Science and Technology, Kumamoto University
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UOZUMI Kiyohiko
Aoyama Gakuin University
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KOSAKA Kouji
Kumamoto Technology Inc.
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OKUDERA Satoru
Kumamoto Technology Inc.
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EGASHIRA Yoshiya
Graduate School of Science and Technology, Kumamato University
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BABA Tetsuro
Kumamoto Technology Incorporated
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HARADA Takashi
Graduate School of Science and Technology, Kumamato University
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MORIYAMA Shiro
Nihon Cerater Corporation
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Teramoto Akinobu
Tohoku Univ. Sendai Jpn
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Ohmi Tadahiro
New Industry Creation Hatchery Center Future Information Industry Creation Center Tohoku University
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Kojima I
National Metrology Institute Of Japan National Institute Of Advanced Industrial Science And Technolo
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Gonda S
The Institute Of Scientific And Industrial Research Osaka University
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Gonda Satoshi
National Metrology Institute Of Japan Aist
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Gonda Satoshi
National Metrology Institute Of Japan National Institute Of Advanced Industrial Science And Technolo
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Okudera Satoru
Kumamoto Technology Inc.:tokyo Technology Inc.
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Yoshimi Makoto
Toshiba Corporation
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Miura-mattausch Mitiko
Department Of Electrical Engineering Hiroshima University
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Azuma Yasushi
National Metrology Institute Of Japan National Institute Of Advanced Industrial Science And Technolo
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Demizu Kiyoshi
Shin'etsu Handotai
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Umeda Hiroshi
Process Development Dept. Wafer Process Engineering Development Div. Lsi Manufacturing Unit Renesas
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Teramoto Akinobu
New Industry Creation Hatchery Center Tohoku Univ.
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TAKAMASU Kiyoshi
The University of Tokyo
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Kurosawa T
National Metrology Institute Of Japan National Institute Of Advanced Industrial Science And Technolo
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MISUMI Ichiko
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technol
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SAKURAI Toshihisa
Tohoku University
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Tsujikawa Shimpei
Process Development Dept. Wafer Process Engineering Development Div. Lsi Manufacturing Unit Renesas
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Akamatsu Yasuhiko
Process Development Dept. Wafer Process Engineering Development Div. Lsi Manufacturing Unit Renesas
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Kawase Kazumasa
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Misumi Ichiko
National Metrology Institute Of Japan National Institute Of Advanced Industrial Science And Technolo
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Kojima Isao
National Chemical Laboratory For Industry
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Fujimoto Toshiyuki
National Metrology Institute Of Japan National Institute Of Advanced Industrial Science And Technolo
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Inoue Masao
Process Development Dept. Process Technology Development Div. Production And Technology Unit Renesas
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Inoue Masao
Process Development Dept. Wafer Process Engineering Development Div. Lsi Manufacturing Unit Renesas
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Furukawa Hiroyuki
Graduate School Of Science And Technology Kumamoto University
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Tsuchiya Toshiaki
Shimane Univ.
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Ohmi Tadahiro
New Industry Creation Hatchery Center (niche) Tohoku University
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Hashimoto Seiji
Nagaoka University of Technology
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Kosaka Kouji
Nagaoka University of Technology
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Kubota Hiroshi
Nagaoka University of Technology
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Teramoto Akinobu
New Industry Creation Hatchery Center (NICHe), Tohoku University, Sendai 980-8579, Japan
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Kurosawa Tomizo
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)
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Inoue Masao
Process Development Department, Process Technology Development Division, Production and Technology Unit, RENESAS Technology Corporation, 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan
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Umeda Hiroshi
Process Development Department, Process Technology Development Division, Production and Technology Unit, RENESAS Technology Corporation, 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan
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Akamatsu Yasuhiko
Process Development Department, Wafer Process Engineering Development Division, LSI Manufacturing Unit, Renesas Technology Corporation, 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan
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Harada Takashi
Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), Ikoma, Nara 630-0192, Japan
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Tsujikawa Shimpei
Process Development Department, Process Technology Development Division, Production and Technology Unit, RENESAS Technology Corporation, 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan
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KUBOTA HIROSHI
Nagaoka Technical College
著作論文
- Adaptive friction compensation for a high precision stage using synchronous piezoelectric device driver (産業計測制御研究会 計測・センサ応用,モーションコントロール全般)
- Accurate Friction Compensation for a High Precision Stage using a Synchronous Piezoelectric Device Driver
- Control of nitrogen profile in radical nitridation of SiO_2 films
- Highly Reliable Piezoelectric Actuator for Precision Stage System
- P-PW-05 Development of the non-resonance type ultra-sonic motor and its application for XY-stage
- Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage
- Evaluation of SOI Wafer Quality and Technological Issues to be Solved
- Reliability of parameters of associated base straight line in step height samples : Uncertainty evaluation in step height measurements using nanometrological AFM
- FOREWORD (Special Issue on Scientific ULSI Manufacturing Technology)