FOREWORD (Special Issue on Scientific ULSI Manufacturing Technology)
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概要
- 論文の詳細を見る
- 社団法人電子情報通信学会の論文
- 1996-03-25
著者
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Ohmi Tadahiro
Tohoku Univ. Sendai Jpn
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Miura-mattausch Mitiko
Department Of Electrical Engineering Hiroshima University
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Ohmi Tadahiro
Tohoku Univ.
関連論文
- Adaptive friction compensation for a high precision stage using synchronous piezoelectric device driver (産業計測制御研究会 計測・センサ応用,モーションコントロール全般)
- Accurate Friction Compensation for a High Precision Stage using a Synchronous Piezoelectric Device Driver
- Control of nitrogen profile in radical nitridation of SiO_2 films
- Highly Reliable Piezoelectric Actuator for Precision Stage System
- P-PW-05 Development of the non-resonance type ultra-sonic motor and its application for XY-stage
- Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage
- Evaluation of SOI Wafer Quality and Technological Issues to be Solved
- Reliability of parameters of associated base straight line in step height samples : Uncertainty evaluation in step height measurements using nanometrological AFM
- FOREWORD (Special Issue on Scientific ULSI Manufacturing Technology)
- PREFACE
- Slip-Free Driving Method for Nonresonant Piezoelectric Actuator
- P-12 Effect of Dissolved Gases on Ultrasonic Cavitation in Liquid(Poster Presentations)