Secondary-Ion-Mass-Spectrometry Depth Profiling of Ultra-shallow Boron Delta Layers in Silicon with Massive Molecular Ion Beam of Ir4(CO)7+
スポンサーリンク
概要
- 論文の詳細を見る
Tetrairidium dodecacarbonyl, Ir4(CO)12, is a massive compound called metal cluster complex, which has a molecular weight of 1104.9. Using an Ir4(CO)7+ primary ion beam, secondary ion mass spectrometry (SIMS) of boron-delta-doped silicon samples was performed. Depth resolution, defined by 1/e decay length for the trailing edge of the boron delta layer, was investigated in the beam energy ranging from 2.5 to 10 keV at an incident angle of 45°. Experimental results showed that the depth resolution improved with oxygen partial pressure at a beam energy of 5 keV. It was confirmed that the depth resolution without oxygen flooding monotonically improved as beam energy decreased. Furthermore, it was found that the favorable effect of oxygen flooding on depth resolution weakened as beam energy was reduced.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-11-15
著者
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FUJIWARA Yukio
National Institute of Advanced Industrial Science and Technology (AIST)
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KONDOU Kouji
National Institute of Advanced Industrial Science and Technology (AIST)
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NONAKA Hidehiko
National Institute of Advanced Industrial Science and Technology (AIST)
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FUJIMOTO Toshiyuki
National Institute of Advanced Industrial Science and Technology (AIST)
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KUROKAWA Akira
National Institute of Advanced Industrial Science and Technology (AIST)
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Ichimura Shingo
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Tomita Mitsuhiro
Corporate Research And Development Center Toshiba Corporation
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Saito Naoaki
National Institute Of Advanced Industrial Science And Technology
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Watanabe Kouji
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Ichimura Shingo
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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