Viscosity Measurement Using Impedance and Frequency of a Quartz Resonator Vibrating in a Viscous Flowing Gas
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概要
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We demonstrate that a quartz resonator vibrating in a viscous flowing gas has two independent outputs, which are an impedance change $\Delta Z(\aki p)$ and a frequency change $\Delta F(\aki p)$, where $p$ is gas pressure. Observations of $\Delta Z(\aki p)$ and $\Delta F(\aki p)$ for N2, O2, Ar, and Ne gases show that the $\Delta Z$--$\Delta F$ plots for all of the gases have no intersections with each other for pressures between 0.16 to 120 kPa. We derive a simple expression for the $\Delta Z$--$\Delta F$ relation, which enables the evaluation of the gas viscosity from measurements of $\Delta Z$ and $\Delta F$ regardless of gas pressure.
- 2011-03-25
著者
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KUROKAWA Akira
National Institute of Advanced Industrial Science and Technology (AIST)
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Hojo Hisao
Vacuum Products Corporation, Kodaira, Tokyo 187-0012, Japan
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Kobayashi Takichi
Vacuum Products Instruments Co., Ltd., Fujikawaguchiko, Yamanashi 401-0302, Japan
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