Relationship between Ozone Oxidation and Stress Evolution on an H-Terminated Si Surface
スポンサーリンク
概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-01-15
著者
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Kawamura Ichiro
Central Research And Development Laboratory Showa Shell Sekiyu K.k.
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NONAKA Hidehiko
National Institute of Advanced Industrial Science and Technology (AIST)
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KUROKAWA Akira
National Institute of Advanced Industrial Science and Technology (AIST)
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ICHIMURA Shingo
National Institute of Advanced Industrial Science and Technology (AIST)
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Nakamura K
Tokyo Electron Ltd. Tokyo Jpn
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KITAJIMA Masahiro
National Research Institute for Metals
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NISHIGUCHI Tetsuya
Meidensha Corporation
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NAKAMURA Ken
National Institute of Advanced Industrial Science and Technology (AIST)
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NARUSHIMA Tetsuya
National Institute of Advanced Industrial Science and Technology (AIST)
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ITAKURA Akiko
National Institute for Materials Science (NIMS)
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Nishiguchi T
Meidensha Corporation
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