An Ultrasonic Suction Pump with No Physically Moving Parts
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-05-30
著者
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Kawamura Ichiro
Central Research And Development Laboratory Showa Shell Sekiyu K.k.
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Nakamura Kentaro
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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HASEGAWA Takeshi
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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UEHA Sadayuki
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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YUN Cheol-Ho
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Nakamura K
Tokyo Electron Ltd. Tokyo Jpn
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