A-11-5 オーバートーン厚み振動子を利用した薄膜の音響特性評価
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概要
- 論文の詳細を見る
- 社団法人電子情報通信学会の論文
- 2000-09-07
著者
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Kawamura Ichiro
Central Research And Development Laboratory Showa Shell Sekiyu K.k.
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中村 圭二
中部大学
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中村 僖良
東北大学大学院工学研究科
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中村 僖良
東北大院・工
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小林 英晃
東北大院・工
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Nakamura K
Department Of Electrical Engineering School Of Engineering Nagoya University
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Nakamura K
Tokyo Electron Ltd. Tokyo Jpn
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小林 英晃
東北大学大学院工学研究科
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