エネルギー閉じ込め型LiTaO3圧電振動ジャイロ (特集1 最近のセンサデバイス)
スポンサーリンク
概要
著者
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Kawamura Ichiro
Central Research And Development Laboratory Showa Shell Sekiyu K.k.
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中村 僖良
東北大学大学院工学研究科
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Nakamura K
Tokyo Electron Ltd. Tokyo Jpn
関連論文
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