NAKAMURA Ken | National Institute of Advanced Industrial Science and Technology (AIST)
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概要
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- 同名の論文著者
- National Institute of Advanced Industrial Science and Technology (AIST)の論文著者
関連著者
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NAKAMURA Ken
National Institute of Advanced Industrial Science and Technology (AIST)
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Ichimura Shingo
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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NONAKA Hidehiko
National Institute of Advanced Industrial Science and Technology (AIST)
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NAKAMURA Ken
National Institute for Agro-Environmental Sciences
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KUROKAWA Akira
National Institute of Advanced Industrial Science and Technology (AIST)
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ICHIMURA Shingo
National Institute of Advanced Industrial Science and Technology (AIST)
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Kawamura Ichiro
Central Research And Development Laboratory Showa Shell Sekiyu K.k.
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Nakamura K
Tokyo Electron Ltd. Tokyo Jpn
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NISHIGUCHI Tetsuya
Meidensha Corporation
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NARUSHIMA Tetsuya
National Institute of Advanced Industrial Science and Technology (AIST)
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ITAKURA Akiko
National Institute for Materials Science (NIMS)
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Nishiguchi T
Meidensha Corporation
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Nakamura K
Display Device Research And Development Department Nippondenso Co. Ltd.
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Nakamura Keiji
Department Of Electrical Engineering School Of Engineering Nagoya University
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Ichimura S
National Inst. Advanced Industrial Sci. And Technol.(aist) Ibaraki Jpn
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Nakamura K
Nagoya University Department Of Electrical Engineering
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Nakamura Kentaro
湘南工科大学
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KITAJIMA Masahiro
National Research Institute for Metals
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中村 僖良
National Institute Of Advanced Industrial Science And Technology (aist)
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KAMEDA Naoto
Meidensha Corporation
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MORIKAWA Yoshiki
Meidensha Corporation
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KEKURA Mitsuru
Meidensha Corporation
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USHIYAMA Tomoharu
National Institute of Advanced Industrial Science and Technology (AIST)
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Morikawa Y
Meidensha Corporation
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Nonakai Hidehiko
National Institute Of Advanced Industrial Science And Technology (aist)
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NISHIGUCHI Tetsuya
National Institute of Advanced Industrial Science and Technology (AIST)
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Koike K
Shiga Technology Center Iwatani International Corporation
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Koike Kunihiko
Shiga Technology Center Iwatani International Corp
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ICHIMURA Shigeo
National Institute of Advanced Industrial Science and Technology (AIST)
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Kameda Naoto
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Kitajima Masahiro
National Defense Academy of Japan, Yokosuka, Kanagawa 239-8686, Japan
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Kitajima Masahiro
National Institute for Materials Science (NIMS), 1-2-1 Sengen, Tsukuba 305-0047, Japan
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Narushima Tetsuya
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba 305-8568, Japan
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Kurokawa Akira
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba 305-8568, Japan
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Ichimura Shingo
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba 305-8568, Japan
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Nonaka Hidehiko
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba 305-8568, Japan
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Nakamura Ken
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
著作論文
- Evaluation of Outermost Surface Temperature of Silicon Substrates during UV-Excited Ozone Oxidation at Low Temperature
- Relationship between Ozone Oxidation and Stress Evolution on an H-Terminated Si Surface
- Effect of Highly Concentrated Ozone on the Etching Properties of Preoxide Films on Si(100) : Semiconductors
- Photochemical Reaction of Ozone and 1,1,1,3,3,3-Hexamethyldisilazane: Analysis of the Gas Reaction between Precursors in a Photochemical Vapor Deposition Process
- Vibrational Spectroscopic Study of the Interface of SiO2/Si(100) Fabricated by Highly Concentrated Ozone: Direct Evidence for Less Strained Si–O–Si Bond Angle
- Relationship between Ozone Oxidation and Stress Evolution on an H-Terminated Si Surface