Relationship between Ozone Oxidation and Stress Evolution on an H-Terminated Si Surface
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概要
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We observed the stress evolution of an H-terminated Si (100) surface during ozone oxidation and the ozone oxidation on a partially H-terminated Si surface of Si (100) and Si (111) to study the surface orientation effect on ozone oxidation. The evolution of stress on the H-terminated Si (100) surface was observed in real-time by an optical micro-mechanical cantilever method. The results show that the stress evolution on the H-terminated Si surface was unexpectedly large when considering that H-termination reduced the sticking amount of oxygen. Both the Si (111) and Si (100) surfaces showed that the rate of ozone oxidation was reduced as hydrogen covered the surfaces. However, at high-H coverage the H-terminated Si (111) surface showed a greater increase of sticking rate than the H-terminated Si (100) surface. The relationship between the oxidation-induced stress and oxidation rate is discussed.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-01-15
著者
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NONAKA Hidehiko
National Institute of Advanced Industrial Science and Technology (AIST)
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KUROKAWA Akira
National Institute of Advanced Industrial Science and Technology (AIST)
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NAKAMURA Ken
National Institute of Advanced Industrial Science and Technology (AIST)
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NARUSHIMA Tetsuya
National Institute of Advanced Industrial Science and Technology (AIST)
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ITAKURA Akiko
National Institute for Materials Science (NIMS)
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Ichimura Shingo
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Kitajima Masahiro
National Defense Academy of Japan, Yokosuka, Kanagawa 239-8686, Japan
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Kitajima Masahiro
National Institute for Materials Science (NIMS), 1-2-1 Sengen, Tsukuba 305-0047, Japan
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Narushima Tetsuya
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba 305-8568, Japan
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Kurokawa Akira
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba 305-8568, Japan
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Ichimura Shingo
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba 305-8568, Japan
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Nonaka Hidehiko
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba 305-8568, Japan
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NAKAMURA Ken
National Institute for Agro-Environmental Sciences
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