Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors (SELECTED TOPICS IN APPLIED PHYSICS : Nano Electronics and Devices : Characterization and Control of Nano Surfaces and Interfaces)
スポンサーリンク
概要
著者
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ITAKURA Akiko
National Institute for Materials Science (NIMS)
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Toda Masaya
Graduate School Of Engineering Tohoku Univ.
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Itakura Akiko
National Institute for Materials Science, Tsukuba, Ibaraki 305-0047, Japan
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Miyake Koji
National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8564, Japan
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Förch Renate
Max Planck Institute for Polymer Research, Mainz D-55128, Germany
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Berger Rüdiger
Max Planck Institute for Polymer Research, Mainz D-55128, Germany
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- Summary Abstract
- Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors
- Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors (SELECTED TOPICS IN APPLIED PHYSICS : Nano Electronics and Devices : Characterization and Control of Nano Surfaces and Interfaces)