Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors
スポンサーリンク
概要
- 論文の詳細を見る
Determination of mechanical properties of thin films, such as the Young's modulus, is of fundamental importance when the films are used for coating or for materials of microelectromechanical systems (MEMS). We show a simple method to calculate the effective Young's modulus of thin films by comparing lateral and vertical expansions. The stress of the film due to expansion in the lateral direction was measured using micromechanical cantilever sensor (MCS) techniques which allow for a calculation of the lateral expansion ratio of the film. The vertical expansion was measured using ellipsometry, surface plasmon resonance (SPR) and other film thickness meters. There is no limitation by the method for a measurement of Young's modulus, even if soft and thin polymer film. We detected the influence of humidity on effective Young's modulus of a polymer material by the method, as an example.
- 2013-11-25
著者
-
ITAKURA Akiko
National Institute for Materials Science (NIMS)
-
Toda Masaya
Graduate School Of Engineering Tohoku Univ.
-
Itakura Akiko
National Institute for Materials Science, Tsukuba, Ibaraki 305-0047, Japan
-
Miyake Koji
National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8564, Japan
-
Förch Renate
Max Planck Institute for Polymer Research, Mainz D-55128, Germany
-
Berger Rüdiger
Max Planck Institute for Polymer Research, Mainz D-55128, Germany
関連論文
- Micro Wishbone Interferometer for Miniature FTIR Spectrometer
- Relationship between Ozone Oxidation and Stress Evolution on an H-Terminated Si Surface
- Fabrication of a Narrow Gold Wire Using Scanning Tunneling Microscopy ( Scanning Tunneling Microscopy)
- Hydrogen Permeation Properties and Surface Structure of Boron Nitride-coated Stainless Steel Membranes
- Magnetic Levitation Transport for XHV Continuous Process
- Bimorph Cantilevers Actuated by Focused Laser from the Side
- Fabrication of Einzel Lens Array with One-Mask Reactive Ion Etching Process for Electron Micro-Optics
- Relationship between Ozone Oxidation and Stress Evolution on an H-Terminated Si Surface
- Surface Patterning Using Blister Exfoliation Induced by Electron Irradiation
- Local Oxidation Induced by Inhomogeneous Stress on Blistered Si Surface
- Summary Abstract
- Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors
- Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors (SELECTED TOPICS IN APPLIED PHYSICS : Nano Electronics and Devices : Characterization and Control of Nano Surfaces and Interfaces)