23-O-06 Crystalline Carbon Nitride Film on Sapphire by Microwave Plasma CVD

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概要

• 論文の詳細を見る
• 日本セラミックス協会の論文
• 2003-09-29

著者

• Koga Y

  National Institute Of Advanced Industrial Science And Technology (aist)

• KOGA Yoshinori

  National Institute of Advanced Industrial Science and Technology (AIST)

• TSUGAWA Kazuo

  National Institute of Advanced Industrial Science and Technology, Research Center for Advanced Carbo

• ISHIKAWA Masahiko

  Ibaraki University, Graduate School of Science and Engineering

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