Effect of Laser Wavelength for Surface Morphology of Aluminum Nitride Thin Films by Nitrogen Radical-Assisted Pulsed Laser Deposition
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-04-01
著者
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Koga Y
National Institute Of Advanced Industrial Science And Technology (aist)
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KOGA Yoshinori
National Institute of Advanced Industrial Science and Technology (AIST)
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ISHIHARA Masatou
National Institute of Advanced Industrial Science and Technology Research Center for Advanced Carbon
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YAMAMOTO Kazuhiro
National Institute of Materials and Chemical Research
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Koga Y
Department Of Physics Kurume University
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KOKAI Fumio
Institute of Research and Innovation
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Yamamoto K
Kaneka Corporation
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