Thermal Degradation of HfSiON Dielectrics Caused by TiN Gate Electrodes and Its Impact on Electrical Properties

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概要

• 論文の詳細を見る
• 2005-09-13

著者

• Nakajima Kaoru

  Dep. Of Micro Engineering Kyoto Univ.

• YASUTAKE Kiyoshi

  Department of Precision Engineering, Faculty of Engineering, Osaka University

• NARA Yasuo

  Semiconductor Leading Edge Technologies, Inc.

• WATANABE Heiji

  Department of Precision Science and Technology, Osaka University

• YAMADA Keisaku

  Nanotechnology Research Laboratories, Waseda University

• Nara Yasuo

  Semiconductor Leading Edge Technologies Inc. (selete)

• Yasutake Kiyoshi

  Department Of Material And Life Science Graduate School Of Engineering Osaka University

• SHIMURA Takayoshi

  Department of Material and Life Science, Graduate School of Engineering, Osaka University

• YAMADA Keisaku

  Waseda Univ.

• AKASAKA Yasushi

  Semiconductor Leading Edge Technologies Inc.

• NAKAMURA Kunio

  Semiconductor Leading Edge Technologies, Inc. (Selete)

• YOSHIDA Shiniti

  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University

• WATANABE Yasumasa

  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University

• Yamamoto K

  Kaneka Corporation

• Watanabe Heiji

  Department Of Material And Life Science Graduate School Of Engineering Osaka University

• Yamada Keisaku

  Graduate School Of Pure And Applied Sciences University Of Tsukuba

• Yasutake K

  Graduate School Of Engineering Osaka University

• Nakamura Kunio

  Semiconductor Leading Edge Technologies Inc. (selete)

• Watanabe Yasumasa

  Department Of Chemical Pharmacology Faculty Of Pharmaceutical Sciences The University Of Tokyo

• Nara Yasuo

  Semiconductor Leading Edge Technologies Inc.

• Yamada Keisaku

  Nanotechnology Research Laboratories Waseda University

• Yoshida Shiniti

  Department Of Precision Science And Technology Graduate School Of Engineering Osaka University

• Shimura Takayoshi

  Graduate School Of Engineering Osaka University

• Shimura Takayoshi

  Department Of Material And Life Science Graduate School Of Engineering Osaka University

• Watanabe Yasumasa

  Department Of Precision Science And Technology Graduate School Of Engineering Osaka University

• Nakamura Kunio

  Semiconductor Leading Edge Technologies Inc.

• AKASAKA Yasushi

  Semiconductor Leading Edge Technologies, Inc.

• YASUTAKE Kiyoshi

  Graduate School of Engineering, Osaka University

• WATANABE Yasumasa

  Department of Aeronautics and Astronautics, The University of Tokyo

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