Nara Yasuo | Semiconductor Leading Edge Technologies Inc. (selete)
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概要
関連著者
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Nara Yasuo
Semiconductor Leading Edge Technologies Inc. (selete)
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Nara Yasuo
Semiconductor Leading Edge Technologies Inc.
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NARA Yasuo
Semiconductor Leading Edge Technologies, Inc.
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Inumiya Seiji
Semiconductor Leading Edge Technologies Inc. (selete)
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INUMIYA Seiji
Semiconductor Leading Edge Technologies, Inc.
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Inumiya Seiji
Semiconductor Company Toshiba Corporation
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Matsuki Takeo
Semiconductor Leading Edge Technologies Inc. (selete)
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YAMADA Keisaku
Waseda Univ.
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MIYAZAKI Seiichi
Hiroshima University
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Miyazaki Seiichi
Graduate School Of Advanced Sciences Of Matter Hiroshima University
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Miyazaki Seiichi
Hiroshima Univ.
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AOYAMA Takayuki
Semiconductor Leading Edge Technologies, Inc. (Selete)
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Yamamoto K
Kaneka Corporation
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Miyazaki Seiichi
Graduate School Of Advanced Sciences And Matters Hiroshima University
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Yamada Keisaku
Graduate School Of Pure And Applied Sciences University Of Tsukuba
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Yamada Keisaku
Nanotechnology Research Laboratories Waseda University
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Aoyama Takayuki
Semiconductor Leading Edge Technologies Inc. (selete)
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Miyazaki Seiichi
Graduate School Of Engineering Nagoya University
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Aoyama Takayuki
Semiconductor Leading Edge Technologies Inc.
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Aoyama Takayuki
Semiconductor Leading Edge Technologies (Selete), Inc., Tsukuba, Ibaraki 305-8569, Japan
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Shiraishi K
Institute Of Physics University Of Tsukuba
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Nakajima Kaoru
Dep. Of Micro Engineering Kyoto Univ.
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WATANABE Heiji
Department of Precision Science and Technology, Osaka University
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YAMADA Keisaku
Nanotechnology Research Laboratories, Waseda University
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SATO Motoyuki
Semiconductor Leading Edge Technologies, Inc. (Selete)
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YAMABE Kikuo
Univ. of Tsukuba
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SHIRAISHI Kenji
Univ. of Tsukuba
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OHJI Yuzuru
Semiconductor Leading Edge Technologies, Inc. (Selete)
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MATSUKI Takeo
Research Department 1, Semiconductor Leading Edge Technologies, Inc.
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NARA Yasuo
Research Department 1, Semiconductor Leading Edge Technologies, Inc.
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TORII Kazuyoshi
Hitachi, Ltd., Central Research Laboratory
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AKASAKA Yasushi
Semiconductor Leading Edge Technologies Inc.
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Yamamoto K
Univ. Of Tsukuba
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Torii Kazuyoshi
Hitachi Ltd. Central Research Laboratory
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Ohji Yuzuru
Semiconductor Leading Edge Technol. Inc. (selete) Ibaraki Jpn
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Ohji Yuzuru
Semiconductor & Integrated Circuits Division Hitachi Ltd.
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Watanabe Heiji
Department Of Material And Life Science Graduate School Of Engineering Osaka University
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Yamamoto K
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology (aist)
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Yamada Keisaku
Univ. Of Tsukuba
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Sato Motoyuki
Semiconductor Leading Edge Technologies Inc. (selete)
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Matsuki Takeo
Research Department 1 Semiconductor Leading Edge Technologies Inc.
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Miyazaki Seiichi
Graduate School of Advanced Sciences of Matter, Hiroshima University
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MURAKAMI Hideki
Graduate School of Advanced Sciences of Matter, Hiroshima University
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HIGASHI Seiichiro
Graduate School of Advanced Sciences of Matter, Hiroshima University
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CHIKYOW Toyohiro
National Institute for Mateirals Science
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Zhao Ming
Department of Oral Pathology, Faculty of Dentistry, Hiroshima University
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SUZUKI Motofumi
Department of Global Agricultural Sciences, Graduate School of Agricultural and Life Sciences
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YASUTAKE Kiyoshi
Department of Precision Engineering, Faculty of Engineering, Osaka University
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Kimura Kenji
Department of Engineering Science, Kyoto University
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Murakami Hideki
Graduate School Of Advanced Sciences Of Matter Hiroshima University
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PEI Yanli
Graduate School of Advanced Sciences and Matter, Hiroshima University
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TORII Kazuyoshi
Semiconductor Leading Edge Technologies, Inc.
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Pei Yanli
Graduate School Of Advanced Sciences And Matter Hiroshima University
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Eimori Takahisa
Semiconductor Leading Edge Technologies Inc.
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Eimori Takahisa
Research Department 1 Semiconductor Leading Edge Technologies Inc.
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Kimura Kenji
Dep. Of Micro Engineering Kyoto Univ.
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NAKAJIMA Kaoru
Department of Micro Engineering, Kyoto University
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UEMATSU Masashi
NTT Basic Research Laboratories, NTT Corporation
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KAMIYAMA Satoshi
Semiconductor Leading Edge Technologies, Inc.
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SHIRAISHI Kenji
Institute of Physics, University of Tsukuba
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Yasutake Kiyoshi
Department Of Material And Life Science Graduate School Of Engineering Osaka University
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SHIMURA Takayoshi
Department of Material and Life Science, Graduate School of Engineering, Osaka University
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Kamiyama Satoshi
Semiconductor Leading Edge Technologies Inc.
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TAMURA Chihiro
Univ. of Tsukuba
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HASUNUMA Ryu
Univ. of Tsukuba
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INUMIYA Seiji
Research Department 1, Semiconductor Leading Edge Technologies, Inc.
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MISE Nobuyuki
Research Department 1, Semiconductor Leading Edge Technologies, Inc.
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UEDONO Akira
Univ. of Tsukuba
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OHTSUKA Shingo
Semiconductor Leading Edge Technologies, Inc. (Selete)
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WADA Tetsunori
Semiconductor Leading Edge Technologies, Inc. (Selete)
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MIURA Takayoshi
Semiconductor Leading Edge Technologies, Inc. (Selete)
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SHIRAI Kiyoshi
Semiconductor Leading Edge Technologies, Inc. (Selete)
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NAKAMURA Kunio
Semiconductor Leading Edge Technologies, Inc. (Selete)
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YOSHIDA Shiniti
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
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WATANABE Yasumasa
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
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Kimura Kenji
Department Of Micro Engineering Kyoto University
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Nakamura Kunio
Department Of Micro Engineering Kyoto University
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Torii Kazuyoshi
Semiconductor Leading Edge Technologies Inc.
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Ohtsuka Shingo
Semiconductor Leading Edge Technologies Inc. (selete)
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Wada Tetsunori
Semiconductor Leading Edge Technologies Inc. (selete)
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Yasutake K
Graduate School Of Engineering Osaka University
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Murakami Hideki
Department Of Semiconductor Electronics And Integration Science Graduate School Of Advanced Sciences
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Zhao Ming
Department Of Micro Engineering Kyoto University
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Nakamura Kunio
Semiconductor Leading Edge Technologies Inc. (selete)
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Nakajima Kaoru
Department Of Engineering Physics And Mechanics Kyoto University
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Uematsu Masashi
Ntt Basic Research Laboratories
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Kasai Naoki
Device Platforms Laboratories Nec Corporation
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Kasai Naoki
Nec
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Hayashi Kiyoshi
Renesas
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Akasaka Yasushi
Semiconductor Leading Edge Technologies Inc. (selete)
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Suzuki Motofumi
Department Of Micro Engineering Kyoto University
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Suzuki Motofumi
Department Of Global Agricultural Sciences Graduate School Of Agricultural And Life Science The Univ
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ONIZAWA Takashi
Semiconductor Leading Edge Technologies, Inc.
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Watanabe Yasumasa
Department Of Chemical Pharmacology Faculty Of Pharmaceutical Sciences The University Of Tokyo
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NISHIMURA Isamu
Rohm
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AKASAKA Yasushi
Research Department 1, Semiconductor Leading Edge Technologies, Inc.
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NOGUCHI Masataka
NEC
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YAMASHITA Koji
Sanyo
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Murakami Hideki
Graduate School Of Advanced Sciences And Matters Hiroshima University
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Miura Takayoshi
Semiconductor Leading Edge Technologies Inc. (selete)
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Zhao Ming
Department Of Dermatology Epigenetic Research Center Second Xiangya Hospital Central South Universit
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Akasaka Yasushi
Research Department 1 Semiconductor Leading Edge Technologies Inc.
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Chikyow Toyohiro
National Inst. Materials Sci. Ibaraki Jpn
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Mise Nobuyuki
Research Department 1 Semiconductor Leading Edge Technologies Inc.
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Yoshida Shiniti
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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Higashi Seiichiro
Department Of Semiconductor Electronics And Integration Science Graduate School Of Advanced Sciences
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Shimura Takayoshi
Graduate School Of Engineering Osaka University
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Shimura Takayoshi
Department Of Material And Life Science Graduate School Of Engineering Osaka University
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Shirai Kiyoshi
Semiconductor Leading Edge Technologies Inc. (selete)
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Uematsu Masashi
Ntt Basic Research Laboratories Ntt Corporation
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Watanabe Yasumasa
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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Onizawa Takashi
Semiconductor Leading Edge Technologies Inc.
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Shiraishi Kenji
Institute Of Physics University Of Tsukuba
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Higashi Seiichiro
Graduate School Of Advanced Sciences Of Matter Hiroshima University
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Kimura Kenji
Deparment Of Engineering Science Kyoto University
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Nakamura Kunio
Semiconductor Leading Edge Technologies Inc.
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AKASAKA Yasushi
Semiconductor Leading Edge Technologies, Inc.
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YASUTAKE Kiyoshi
Graduate School of Engineering, Osaka University
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Higashi Seiichiro
Graduate School of Advanced Science of Matter, Hiroshima University, Higashihiroshima, Hiroshima 739-8530, Japan
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Suzuki Motofumi
Department of Engineering Physics and Mechanics, Kyoto University, Kyoto 606-8501, Japan
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Miyazaki Seiichi
Graduate School of Advanced Science and Matter, Hiroshima University, Higashihiroshima, Hiroshima 739-8530, Japan
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WATANABE Yasumasa
Department of Aeronautics and Astronautics, The University of Tokyo
著作論文
- Evaluation of Dielectric Reliability of Ultrathin HfSiO_xN_y in Metal-Gate Capacitors(Ultra-Thin Gate Insulators,Fundamentals and Applications of Advanced Semiconductor Devices)
- High-resolution RBS analysis of Si-dielectrics interfaces
- Comprehensive Understanding of PBTI and NBTI reliability of High-k / Metal Gate Stacks with EOT Scaling to sub-1nm
- Hf and N Release from HfSiON in High-Temperature Annealing Induced by Oxygen Incorporation
- Mechanism of Threshold Voltage Reduction and Hole Mobility Enhancement in pMOSFETs Employing Sub-1nm EOT HfSiON by Use of Substrate Fluorine Ion Implantation
- Extendibility of High Mobility HfSiON Gate Dielectrics
- Thermal Degradation of HfSiON Dielectrics Caused by TiN Gate Electrodes and Its Impact on Electrical Properties
- Performance and Reliability Improvement by Optimized Nitrogen Content of TaSiNx Metal Gate in Metal/HfSiON nFETs
- Area Selective Flash Lamp Post-Deposition Annealing of High-k Film Using Si Photo Absorber for Metal Gate MISFETs with NiSi Source/Drain