High-resolution RBS analysis of Si-dielectrics interfaces

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概要

• 論文の詳細を見る
• 2006-09-13

著者

• Shiraishi K

  Institute Of Physics University Of Tsukuba

• Nakajima Kaoru

  Dep. Of Micro Engineering Kyoto Univ.

• CHIKYOW Toyohiro

  National Institute for Mateirals Science

• Zhao Ming

  Department of Oral Pathology, Faculty of Dentistry, Hiroshima University

• SUZUKI Motofumi

  Department of Global Agricultural Sciences, Graduate School of Agricultural and Life Sciences

• Kimura Kenji

  Department of Engineering Science, Kyoto University

• NARA Yasuo

  Semiconductor Leading Edge Technologies, Inc.

• TORII Kazuyoshi

  Semiconductor Leading Edge Technologies, Inc.

• Kimura Kenji

  Dep. Of Micro Engineering Kyoto Univ.

• NAKAJIMA Kaoru

  Department of Micro Engineering, Kyoto University

• UEMATSU Masashi

  NTT Basic Research Laboratories, NTT Corporation

• KAMIYAMA Satoshi

  Semiconductor Leading Edge Technologies, Inc.

• WATANABE Heiji

  Department of Precision Science and Technology, Osaka University

• SHIRAISHI Kenji

  Institute of Physics, University of Tsukuba

• YAMADA Keisaku

  Nanotechnology Research Laboratories, Waseda University

• Nara Yasuo

  Semiconductor Leading Edge Technologies Inc. (selete)

• Kamiyama Satoshi

  Semiconductor Leading Edge Technologies Inc.

• YAMABE Kikuo

  Univ. of Tsukuba

• SHIRAISHI Kenji

  Univ. of Tsukuba

• YAMADA Keisaku

  Waseda Univ.

• Yamamoto K

  Univ. Of Tsukuba

• Yamamoto K

  Kaneka Corporation

• Kimura Kenji

  Department Of Micro Engineering Kyoto University

• Nakamura Kunio

  Department Of Micro Engineering Kyoto University

• Torii Kazuyoshi

  Semiconductor Leading Edge Technologies Inc.

• Watanabe Heiji

  Department Of Material And Life Science Graduate School Of Engineering Osaka University

• Yamada Keisaku

  Graduate School Of Pure And Applied Sciences University Of Tsukuba

• Zhao Ming

  Department Of Micro Engineering Kyoto University

• Nakajima Kaoru

  Department Of Engineering Physics And Mechanics Kyoto University

• Yamamoto K

  Photonics Research Institute National Institute Of Advanced Industrial Science And Technology (aist)

• Uematsu Masashi

  Ntt Basic Research Laboratories

• Suzuki Motofumi

  Department Of Micro Engineering Kyoto University

• Suzuki Motofumi

  Department Of Global Agricultural Sciences Graduate School Of Agricultural And Life Science The Univ

• Nara Yasuo

  Semiconductor Leading Edge Technologies Inc.

• Yamada Keisaku

  Nanotechnology Research Laboratories Waseda University

• Zhao Ming

  Department Of Dermatology Epigenetic Research Center Second Xiangya Hospital Central South Universit

• Chikyow Toyohiro

  National Inst. Materials Sci. Ibaraki Jpn

• Uematsu Masashi

  Ntt Basic Research Laboratories Ntt Corporation

• Shiraishi Kenji

  Institute Of Physics University Of Tsukuba

• Kimura Kenji

  Deparment Of Engineering Science Kyoto University

• Suzuki Motofumi

  Department of Engineering Physics and Mechanics, Kyoto University, Kyoto 606-8501, Japan

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