Structure of Ultrathin Epitaxial CeO_2 Films Grown on Si(111)
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-11-30
著者
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Matsushita Daisuke
Advanced Lsi Technology Laboratory Corporate Research & Development Center Toshiba Corporation
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Nakata Y
Fujitsu Ltd. Atsugi Jpn
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SUZUKI Motofumi
Department of Global Agricultural Sciences, Graduate School of Agricultural and Life Sciences
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Kimura Kenji
Department of Engineering Science, Kyoto University
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Nishikawa Yukie
Advanced Lsi Technology Laboratory Corporate Research & Development Center Toshiba Corporation
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Kimura Kenji
Dep. Of Micro Engineering Kyoto Univ.
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NAKAJIMA Kaoru
Department of Micro Engineering, Kyoto University
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JOUMORI Shinji
Department of Engineering Physics and Mechanics, Kyoto University
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YAMAGUCHI Takeshi
Advanced LSI Technology Laboratory, Toshiba Corporation
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SATOU Nobutaka
Toshiba Nanoanalysis Corporation
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