Angular Dependence of Sputtering Yield of Au on Bombardment by 15 to 60 keV Ar^+
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概要
- 論文の詳細を見る
The angular dependence of the sputtering yield of Au on bombardment by 15 to 60 keV Ar^+ has been studied experimentally. The increase in the sputtering yield as the angle θ of the incident beam is tilted from the normal is proportional to (cos θ)^<-1>. A critical angle at which the sputtering yield deviates from (cos θ)^<-1> dependence is derived, and its dependence on the ion energy is compared with the results calculated from 21 model of the reflection of ions at the vacuum/target interface.
- 社団法人応用物理学会の論文
- 1983-12-20
著者
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Kimura Kenji
Department of Engineering Science, Kyoto University
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KOJIMA Shu-ichi
Department of Pharmacology, Dokkyo Medical University School of Medicine
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Kojima Shu-ichi
Department Of Engineering Science Kyoto University
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NANNAMI Michi-hiko
Department of Engineering Science, Kyoto University
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Nannami Michi-hiko
Department Of Engineering Science Kyoto University
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Kimura Kenji
Department Of Engineering Science Kyoto University
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Kimura Kenji
Deparment Of Engineering Science Kyoto University
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