Anomalous Surface Amorphization of Si(001) Induced by 3-5keV Ar^+ Ion Bombardment
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-04-01
著者
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Kimura Kenji
Department of Engineering Science, Kyoto University
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NAKAJIMA Kaoru
Department of Micro Engineering, Kyoto University
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Nakajima Kaoru
Department Of Engineering Physics And Mechanics Kyoto University
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TOYOFUKU Hisami
Department of Engineering Physics and Mechanics, Kyoto University
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Toyofuku Hisami
Department Of Engineering Physics And Mechanics Kyoto University
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Kimura Kenji
Deparment Of Engineering Science Kyoto University
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Kimura Kenji
Department Of Engineering Physics And Mechanics Kyoto University
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