Lattice Distortion at SiO2/Si(001) Interface Studied with High-Resolution Rutherford Backscattering Spectroscopy/Channeling
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Nakajima Kaoru
Dep. Of Micro Engineering Kyoto Univ.
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Kimura Kenji
Dep. Of Micro Engineering Kyoto Univ.
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