GaN Film Fabrication by Near-Atmospheric Plasma-Assisted Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2007-01-25
著者
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SAKUMA Yoshiki
National Institute for Materials Science
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Sakuma Yoshiki
National Inst. Materials Sci.(nims) Tsukuba Jpn
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CHIKYOW Toyohiro
National Institute for Mateirals Science
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Nagata Takahiro
National Institute For Materials Science (nims)
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Sakuma Yoshiki
National Institute For Materials Science (nims)
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Sakuma Yoshiki
Nanomaterials Laboratory National Institute For Materials Science
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UEHARA Tsuyoshi
Sekisui Chemical Co., Ltd.
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Chikyow Toyohiro
National Institute For Materials Science (nims)
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Chikyow Toyohiro
National Inst. Materials Sci. Ibaraki Jpn
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Uehara Tsuyoshi
Sekisui Chemical Co. Ltd.
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