White X-ray Topography of Lattice Undulation in Bonded Silicon-on-Insulator Wafers

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-09-15

著者

• IIDA Satoshi

  Department of Physics,Kwansei-Gakuin University

• FUKUDA Kazunori

  Department of Oriental Medicine, Gifu University School of Medicine

• YASUTAKE Kiyoshi

  Department of Precision Engineering, Faculty of Engineering, Osaka University

• UMENO Masataka

  Department of Precision Engineering, Faculty of Engineering, Osaka University

• Yasutake Kiyoshi

  Graduate School Of Engineering Osaka University

• SHIMURA Takayoshi

  Department of Material and Life Science, Graduate School of Engineering, Osaka University

• Yoshida Takayoshi

  Department Of Material And Life Science Graduate School Of Engineering Osaka University

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