Formation of Thin Oxide Films on Room-Temperature Silicon (100) by Exposure to a Neutral Beam of Hyperthermal Atomic and Molecular Oxygen

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1998-12-01

著者

• Minton Timothy

  Department Of English Nippon Medical School

• Minton Timothy

  Department Of Chemistry And Biochemistry Montana State University

• TAGAWA Masahito

  Department of Mechanical Engineering, Kobe University

• Kinoshita Hiroshi

  Department of Mechanical Engineering, Faculty of Engineering, Kobe University

• Ohmae Nobuo

  Department of Mechanical Engineering, Faculty of Engineering, Kobe University

• Umeno M

  Department Of Electronic Engineering Chubu University

• Umeno Masayoshi

  Department Of Electronic And Computer Engineering Nagoya Institute Of Technology

• Umeno Masayoshi

  Department Of Electric And Computer Engineering Nagoya Institute Of Technology

• Umeno Masayoshi

  Department Of Electronic Mechanical Engineering Nagoya University

• Umeno M

  Fukui Univ. Technol. Fukui Jpn

• Ohmae Nobuo

  Department Of Mechanical Engineering Faculty Of Engineering Kobe University

• UMENO Masataka

  Department of Precision Engineering, Faculty of Engineering, Osaka University

• Tagawa Masahito

  Department Of Mechanical Engineering Faculty Of Engineering Kobe University

• EMA Tatsuhiko

  Department of Material and Life Science, Graduate School of Engineering, Osaka University

• Ema Tatsuhiko

  Department Of Material And Life Science Graduate School Of Engineering Osaka University

• Umeno Masataka

  Department Of Material And Life Science Graduate School Of Engineering Osaka University

• Umeno Masataka

  Graduate School Of Engineering Osaka University

• Umeno Masataka

  Department Of Applied Physics Faculty Of Engineering Osaka University

• Kinoshita Hiroshi

  Department Of Material And Life Science Graduate School Of Engineering Osaka University

• Kinoshita Hiroshi

  Department Of Forensic Medicine Faculty Of Medicine Kagawa University

• Umeno M

  Department Of Management And Information Science Faculty Of Engineering Fukui University Of Technolo

• Umeno M

  Nagoya Inst. Technology

• Kinoshita Hiroshi

  Department Of Bioresource Engineering Faculty Of Agriculture Yamagata University

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