Accurate Thickness Determination of Both Thin SiO_2 on Si and Thin Si on SiO_2 by Angle-Resolved X-Ray Photoelectron Spectroscopy

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-07-15

著者

• Umeno M

  Department Of Electronic Engineering Chubu University

• Umeno Masayoshi

  Department Of Electronic And Computer Engineering Nagoya Institute Of Technology

• Umeno Masayoshi

  Department Of Electric And Computer Engineering Nagoya Institute Of Technology

• Umeno Masayoshi

  Department Of Electronic Mechanical Engineering Nagoya University

• Umeno M

  Fukui Univ. Technol. Fukui Jpn

• Umeno Masataka

  Department Of Material And Life Science Graduate School Of Engineering Osaka University

• Umeno Masataka

  Graduate School Of Engineering Osaka University

• KAWAZU Satoru

  Department of Electronics and Photonic Systems Engineering, Kochi University of Technology

• Yamamoto H

  Sharp Corp. Nara Jpn

• Yamamoto H

  College Of Science And Technology Nihon University

• Kawazu S

  Department Of Electronics And Photonic Systems Engineering Kochi University Of Technology

• MASHIKO Yoji

  ULSI Laboratory, Evaluation amp Analysis Center, Mitsubishi Electric Corporation

• Mashiko Y

  Mitsubishi Electric Corp. Hyogo Jpn

• Katayama T

  Precision & Intelligence Laboratory Tokyo Institute Of Technology

• Katayama Toshiharu

  Graduate School of Engineering, Osaka University

• Yamamoto Hidekazu

  ULSI Development Center, Mitsubishi Electric Corporation

• Ikeno Masahiko

  ULSI Development Center, Mitsubishi Electric Corporation

• Ikeno Masahiko

  Ulsi Development Center Mitsubishi Electric Corporation

• Yamamoto H

  Laboratory Of Bioorganic Chemistry School Of Pharmaceutical Sciences University Of Shizuoka

• Umeno M

  Department Of Management And Information Science Faculty Of Engineering Fukui University Of Technolo

• Mashiko Yoji

  Ulsi Development Center Mitsubishi Electric Corp

• Umeno M

  Nagoya Inst. Technology

• Yamamoto Hidekazu

  Ulsi Development Center Mitsubishi Electric Corporation

• Kawazu Satoru

  Department of Electronic and Photonic Systems Engineering, Kochi University of Technology, Tosayamada, Kochi 782-0003, Japan

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