Yamamoto Hidekazu | Ulsi Development Center Mitsubishi Electric Corporation
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概要
関連著者
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Yamamoto Hidekazu
Ulsi Development Center Mitsubishi Electric Corporation
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Yamamoto Hidekazu
ULSI Development Center, Mitsubishi Electric Corporation
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Mashiko Yoji
Ulsi Development Center Mitsubishi Electric Corp
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Umeno Masataka
Graduate School Of Engineering Osaka University
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Kawazu Satoru
Department of Electronic and Photonic Systems Engineering, Kochi University of Technology, Tosayamada, Kochi 782-0003, Japan
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Umeno M
Department Of Electronic Engineering Chubu University
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Umeno Masayoshi
Department Of Electronic And Computer Engineering Nagoya Institute Of Technology
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Umeno Masayoshi
Department Of Electric And Computer Engineering Nagoya Institute Of Technology
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Umeno Masayoshi
Department Of Electronic Mechanical Engineering Nagoya University
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Umeno M
Fukui Univ. Technol. Fukui Jpn
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Umeno Masataka
Department Of Material And Life Science Graduate School Of Engineering Osaka University
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KAWAZU Satoru
Department of Electronics and Photonic Systems Engineering, Kochi University of Technology
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Yamamoto H
Sharp Corp. Nara Jpn
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Yamamoto H
College Of Science And Technology Nihon University
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Kawazu S
Department Of Electronics And Photonic Systems Engineering Kochi University Of Technology
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MASHIKO Yoji
ULSI Laboratory, Evaluation amp Analysis Center, Mitsubishi Electric Corporation
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Mashiko Y
Mitsubishi Electric Corp. Hyogo Jpn
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Katayama T
Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Yamamoto H
Laboratory Of Bioorganic Chemistry School Of Pharmaceutical Sciences University Of Shizuoka
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Umeno M
Department Of Management And Information Science Faculty Of Engineering Fukui University Of Technolo
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Umeno M
Nagoya Inst. Technology
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Katayama Toshiharu
Graduate School of Engineering, Osaka University
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Ikeno Masahiko
ULSI Development Center, Mitsubishi Electric Corporation
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Ikeno Masahiko
Ulsi Development Center Mitsubishi Electric Corporation
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Koyama Hiroshi
Ulsi Development Center Mitsubishi Electric Corporation:(present Address)jeol Limited
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KOYAMA Hiroshi
ULSI Laboratory, Evaluation amp Analysis Center, Mitsubishi Electric Corporation
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Katayama Toshiharu
ULSI Development Center, Mitsubishi Electric Corporation, 4-1 Mizuhara, Itami, Hyogo 664-8641, Japan
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KIMURA Mutsumi
Ryukoku University
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Kimura Mutsumi
Ryukoku University:innovative Materials And Processing Research Center
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KATAYAMA Toshiharu
ULSI Laboratory, Mitsubishi Electric Corporation
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Yoshisato Yorinobu
Tsukuba Research Center Sanyo Electric Co. Ltd.
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Yoshisato Yorinobu
Functional Materials Research Center Sanyo Electric Co. Ltd.
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Kimura M
Department Of Electrical Engineering Kure National College Of Technology
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Koyama H
Mitsubishi Electric Corp. Hyogo Jpn
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Mashiko Yoji
Ulsi Development Center Mitsubishi Electric Corporation
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Kimura Mikihiro
Ulsi Laboratory Mitsubishi Electric Corporation
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YOSHIDA Yoshiko
ULSI Laboratory, Mitsubishi Electric Corp.
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KUME Morihiko
ULSI Laboratory, Mitsubishi Electric Corp.
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Kume Morihiko
Ulsi Laboratory Mitsubishi Electric Corp.
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Yoshida Y
Yamaguchi Univ. Ube‐shi Jpn
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Yamamoto H
Toshiba Corp. Kawasaki‐shi Jpn
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Katayama Toshiharu
Ulsi Laboratory Mitsubishi Electric Corporation
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Kimura Mutsumi
Ryukoku Univ. Otsu‐shi Jpn
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MATSUKAWA Kazuhito
ULSI Development Center, Mitsubishi Electric Corporation
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Matsukawa Kazuhito
Ulsi Development Center Mitsubishi Electric Corporation
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Umeno Masataka
Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
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Koyama Hiroshi
ULSI Development Center, Mitsubishi Electric Corporation, 4-1 Mizuhara, Itami, Hyogo 664-8641, Japan
著作論文
- Effect of Ultrathin Top Silicon Layers on the X-Ray Photoelectron Emission from the Buried Oxide in Silicon-on-Insulator Wafers
- Accurate Thickness Determination of Both Thin SiO_2 on Si and Thin Si on SiO_2 by Angle-Resolved X-Ray Photoelectron Spectroscopy
- Elimination of X-Ray Photoelectron Diffraction Effect of Si(100) for Accurate Determination of SiO_2 Overlayer Thickness
- Kikuchi-Band Analysis of X-Ray Photoelectron Diffraction Fine Structure of Si(100) by Precise Angle-Resolved X-Ray Photoelectron Spectroscopy
- Test Structure for the Evaluation of Si Substrates (Special Issue on Microelectronic Test Structure)
- A Study of Metal Impurities Behavior due to Difference in Isolation Structure on ULSI Devices
- Kikuchi-Band Analysis of X-Ray Photoelectron Diffraction Fine Structure of Si(100) by Precise Angle-Resolved X-Ray Photoelectron Spectroscopy