The Deposition of a-C : H Films by Pulsed Laser Ablation

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概要

• 論文の詳細を見る

• A new technique has been introduced to deposit amorphous hydrogenated carbon films (a-C:H) by pulsed laser deposition (PLD). Camphor, a natural source, has played a crucial role for the evolution of the film from amorphous carbon (a-C) to amorphous hydrogenated carbon (a-C:H). This has been confirmed by the presence of C-H stretching bond observed in the FTIR absorption spectra. The influence of camphor incorporation to the optical, electrical, and structural properties of the carbon film has been investigated by UV-visible spectroscopy, FTIR spectroscopy, Hall measurement, and Raman shift. As a kind of photo detectors, a solar cell with a-C:H/p-Si structure has been fabricated, its current-voltage (I-V) characteristics and spectral response are also studied. From the measurement of quantum efficiency, we find that the light sensing property of the new type of a-C:H film have been improved notably. In the short-wavelength region, the a-C:H layer contributes a maximum quantum efficiency as high as 30% despite the light loss by the surface electrode.

• 社団法人 電気学会の論文
• 2004-02-01

著者

• SOGA Tetsuo

  Department of Frontier Materials, Nagoya Institute of Technology

• UMENO Masayoshi

  Department of electrical and Computer Engineering, Nagoya Institute of Technology

• JIMBO Takashi

  Department of Environmental Technology & Urban Planning, Nagoya Institute of Technology

• Jimbo T

  Department Of Environment Technology And Urban Planning Nagoya Institute Of Technology

• Jimbo T

  Research Center For Nano-device And System Nagoya Institute Of Technology

• Umeno M

  Department Of Electronic Engineering Chubu University

• Umeno Masayoshi

  Department Of Electronic And Computer Engineering Nagoya Institute Of Technology

• Umeno Masayoshi

  Department Of Electric And Computer Engineering Nagoya Institute Of Technology

• Umeno Masayoshi

  Department Of Electronic Mechanical Engineering Nagoya University

• Soga T

  Department Of Environment Technology And Urban Planning Nagoya Institute Of Technology

• Soga Tetsuo

  Department Of Electronics Faculty Of Engineering Nagoya University

• Umeno M

  Fukui Univ. Technol. Fukui Jpn

• Jimbo Takashi

  Department Of Electrical And Computer Engineering Nagoya Institute Of Technology

• Tian Xuemm

  Department Of Environmental Technology And Urban Planning Nagoya Institute Of Technology

• TIAN Xuemin

  Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology

• MISHRA Dillip

  Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology

• Umeno Masataka

  Department Of Material And Life Science Graduate School Of Engineering Osaka University

• Umeno Masataka

  Graduate School Of Engineering Osaka University

• Soga T

  Nagoya Inst. Technol. Nagoya Jpn

• Jimbo Takashi

  Research Center For Micro-structure Devices Nagoya Institute Of Technology

• Umeno Masayoshi

  Department Of Electronic Engineering Chubu University

• Mishra Dillip

  Department Of Environmental Technology And Urban Planning Nagoya Institute Of Technology

• Tian Xuemin

  Department Of Environmental Technology And Urban Planning Nagoya Institute Of Technology

• Soga Takashi

  Central Research Laboratory Hitachi Limited

• Jimbo T

  Nagoya Inst. Technology Nagoya Jpn

• Jimbo T

  Ulvac Inc. Shizuoka Jpn

• Umeno M

  Department Of Management And Information Science Faculty Of Engineering Fukui University Of Technolo

• Umeno M

  Nagoya Inst. Technology

• Soga Tetsuo

  Department of Electrical and Computer Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466

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