Grown-in Microdefects in a Slowly Grown Czochralski Silicon Crystal Observed by Synchrotron Radiation Topography
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-11-15
著者
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IIDA Satoshi
Department of Physics,Kwansei-Gakuin University
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Kawata Hiroshi
Photon Factory, National Laboratory for High Energy Physics
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Abe Tomoki
Department Of Electrical And Electronic Engineering Faculty Of Engineering Tottori University
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Iida S
Nagaoka Univ. Technol. Nagaoka Jpn
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Aoki Yasushi
Japan Atomic Energy Research Institute
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Aoki Y
Department Of Materials Development Japan Atomic Energy Research Institute
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Kawata Hiroshi
Photon Factory Institute Of Materials Structure Science
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Aoki Yuji
Superconductivity Research Laboratory Istec
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Abe T
Seh Isobe R&d Center Shin-etsu Handotai Co. Ltd.
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Abe Takao
Shin-etsu Handotai
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Abe Takao
Shin-etsu Handotai Company
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Abe Takao
Seh R&d Center Shin-etsu Handotai Co. Ltd.
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Sugita Yutaka
Research Institute Of Electrical Communication Tohoku University
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Sugita Yutaka
Hitachi Research Laboratory Hitachi Lid.
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Iida S
Toyama Univ. Toyama Jpn
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Iida Shinya
Speedfam Co. Ltd.
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Iida Satoshi
Department Of Orthopaedic Surgery Matsudo City Hospital
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Sugita Y
Department Of Physics Toyama University
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Kawata H
Department Of Physics And Electronics Gra4uate School Of Engineering Osaka Prefecture University
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AOKI Yoshirou
Department of Physics, Toyama University
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SUGITA Yoshimitsu
Department of Physics, Toyama University
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ABE Takao
SEH Isobe R&D Center, Shin-Etsu Handotai Co., Ltd.
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Aoki Y
Advanced Technology Research Center Kanagawa Institute Of Technology
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Abe T
Department Of Electrical And Electronic Engineering Faculty Of Engineering Tottori University
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KAWATA Haruo
Fujitsu Laboratories Limited
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Iida Satoshi
Department Of Orthopaedic Surgery Chiba University
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Sugita Yoshimitsu
Department Of Physics Toyama University
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Aoki Yoshirou
Department of Electrical and Electric Engineering, Kanagawa Institute of Technology
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Abe Takao
SEH Isobe R&D Center, Shin-Etsu Handotai Co., Ltd., 2-13-1 Isobe, Annaka, Gunma 379-01, Japan
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