Vapor-Phase Atomic Layer Epitaxy of CuGaS_2 at Atmospheric Pressure Using Metal Chlorides and H_2S

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-02-15

著者

• Tsuboi Nozomu

  Faculty Of Engineering Niigata University

• Tsuboi Nozomu

  Department Of Electrical Engineering Nagaoka University Of Technology:(present Address)department Of

• Tsuboi Nozomu

  Nagaoka University Of Technology

• IIDA Seishi

  Nagaoka University of Technology

• Iida S

  Nagaoka Univ. Technol. Nagaoka Jpn

• Iida S

  Toyama Univ. Toyama Jpn

• Iida Shinya

  Speedfam Co. Ltd.

• ISU Takehiro

  Nagaoka University of Technology

• KAKUDA Noritoshi

  Nagaoka University of Technology

• TERASAKO Tomoaki

  Nagaoka University of Technology

• Iida Seishi

  Nagaoka Univerity Of Technology Kamitomioka

• Tsuboi N

  Faculty Of Engineering Niigata University

• Terasako Tomoaki

  Faculty of Engineering, Ehime University

• Terasako T

  Faculty Of Engineering Ehime University

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