Effects of Annealing on Chemical Composition, Crystallinity, Optical Transmission and Electrical Conductivity of ZnO Thin Films Prepared on Glass Substrates by Chemical Bath Deposition
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概要
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The effects of annealing on the chemical composition and other properties of ZnO thin films prepared on glass substrates by chemical bath deposition are described. The atomic ratio $\text{[Zn]}:\text{[O]}$ of the unannealed film measured by electron probe X-ray microanalysis (EPMA) is $45:55$, lower than the ideal ratio $50:50$. It gradually increases toward the ideal ratio with increasing annealing temperature up to 500°C. The change in the atomic ratio $\text{[Zn]}:\text{[O]}$ is interpreted to be due to the content of remaining Zn(OH)2, whose existence in films is determined by the analysis of the O1S peak in X-ray photoelectron spectroscopy (XPS) spectra, that decreases with increasing annealing temperature. The increase in electrical conductivity is observed on annealed films. This is also interpreted to be due to the decrease in the content of remaining Zn(OH)2. Notable changes in crystallinity and optical transmission by annealing are not observed.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-03-15
著者
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Tsuboi Nozomu
Faculty Of Engineering Niigata University
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Kaneko Futao
Faculty Of Engineering Niigata University
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OSHIMA Kohei
Graduate School of Science and Technology, Niigata University
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SASAKI Takayuki
Graduate School of Science and Technology, Niigata University
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Kobayashi Satoshi
Faculty Of Engineering Niigata University
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Tsuboi Nozomu
Faculty of Engineering, Niigata University, 8050 Ikarashi 2-nocho, Niigata 950-2181, Japan
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Sasaki Takayuki
Graduate School of Science and Technology, Niigata University, 8050 Ikarashi 2-nocho, Niigata 950-2181, Japan
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