Improvement in Layer Quality of CuGaS_2 Grown by Vapor Phase Epitaxy with Metal Chlorides and H_2S Sources
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-12-30
著者
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Tsuboi Nozomu
Faculty Of Engineering Niigata University
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Tsuboi Nozomu
Department Of Electrical Engineering Nagaoka University Of Technology:(present Address)department Of
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Tsuboi Nozomu
Nagaoka University Of Technology
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IIDA Seishi
Nagaoka University of Technology
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Iida S
Nagaoka Univ. Technol. Nagaoka Jpn
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Iida S
Toyama Univ. Toyama Jpn
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Iida Shinya
Speedfam Co. Ltd.
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ISU Takehiro
Nagaoka University of Technology
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ANDO Yoshihide
Nagaoka University of Technology
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SAWADA Masayuki
Nagaoka University of Technology
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Iida Seishi
Nagaoka Univerity Of Technology Kamitomioka
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Tsuboi N
Faculty Of Engineering Niigata University
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Sawada M
Nagaoka University Of Technology
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