Study of Effects of Metal Layer on Hydrogen Desorption from Hydrogenated Amorphous Silicon Using Temperature-Programmed Desorption
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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Yasutake Kiyoshi
Graduate School Of Engineering Osaka University
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Yasutake K
Osaka Univ. Osaka
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Yasutake Kiyoshi
Osaka Univ. Osaka Jpn
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Kakiuchi Hiroaki
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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Yasutake K
Graduate School Of Engineering Osaka University
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OHMI Hiromasa
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
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HAMAOKA Yoshinori
Osaka University, Dept. of Precision Science and Technology, Graduate School of Eng.
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OHMI Hiromasa
Osaka University, Dept. of Precision Science and Technology, Graduate School of Eng.
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KAKIUCHI Hiroaki
Osaka University, Dept. of Precision Science and Technology, Graduate School of Eng.
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Ohmi Hajime
School Of Engineering Nagoya University
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Hamaoka Yoshinori
Osaka University Dept. Of Precision Science And Technology Graduate School Of Eng.
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